에어로졸 증착법에 의한 압전 PZT 후막의 제조
Fabrication of piezoelectric PZT thick film by aerosol deposition method
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초록
Lead zirconate titanate (PZT) thick films with a thickness of 10-20 ㎛ were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of 1-2㎛, was observed using SEM. The average diameter (d50) was 1.1 μm. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-depositedfilm with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of 700°C. A 20-㎛ thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.
Abstract
Lead zirconate titanate (PZT) thick films with a thickness of 10-20 ㎛ were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of 1-2㎛, was observed using SEM. The average diameter (d50) was 1.1 μm. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-depositedfilm with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of 700°C. A 20-㎛ thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.
참고문헌 (13)
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