입자 크기 분포에 따른 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni1/3Nb2/3)O3-0.35PbTiO3-0.23PbZrO3 후막의 미세구조 및 압전특성
Piezoelectric properties and microstructure of 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni1/3Nb2/3)O3-0.35PbTiO3-0.23PbZrO3 thick film with particle size distribution
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The PZT based piezoelectric thick films prepared by screen printing method have been mainly used as a functional material for MEMS applications due to their compatibility of MEMS process. However the screen printed thick films generally reveal poor electrical and mechanical properties because of their porous microstructure. To improve microstructure we mixed attrition milled powder with ball milled powder of 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni1/3Nb2/3)O3- 0.35PbTiO3-0.23PbZrO3+0.1 wt% Y2O3+ 1.5 wt% ZnO composition. By mixing 25 % of attrition milled powder and 75 % of ball milled powder, the broadest particle size distribution was obtained, leading to a dense thick film with crack-free microstructure and improved dielectric properties. The X-ray diffraction analysis revealed that the film was in wellcrystallized perovskite phase. The remanent polarization was increased from 13.7 μC/cm2 to 23.3 μC/cm2 at the addition of 25 % attrition milled powder.
Abstract
The PZT based piezoelectric thick films prepared by screen printing method have been mainly used as a functional material for MEMS applications due to their compatibility of MEMS process. However the screen printed thick films generally reveal poor electrical and mechanical properties because of their porous microstructure. To improve microstructure we mixed attrition milled powder with ball milled powder of 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni1/3Nb2/3)O3- 0.35PbTiO3-0.23PbZrO3+0.1 wt% Y2O3+ 1.5 wt% ZnO composition. By mixing 25 % of attrition milled powder and 75 % of ball milled powder, the broadest particle size distribution was obtained, leading to a dense thick film with crack-free microstructure and improved dielectric properties. The X-ray diffraction analysis revealed that the film was in wellcrystallized perovskite phase. The remanent polarization was increased from 13.7 μC/cm2 to 23.3 μC/cm2 at the addition of 25 % attrition milled powder.
참고문헌 (19)
- B. Morten, "Resonant pressure sensor based on piezo-electric properties", Sensor and Actuators A, 31, pp.153~158 (1992)
- K. Yao, "Improved preparation procedure and properties for a multilayer piezoelectric thick-film actuator", Sensors and Actuators A, 71, pp.139~143 (1998)
- 정귀상, "적층형 압전밸브의 설계, 제작 및 특성", 센서학회지, 13(3), pp.230~235 (2004), 한국센서학회
- S. P. Beeby, "Thick film PZT", micromachined silicon accelerometer, 1999, pp.35, 2060~2061
- M. Koch, "The dynamic micropump driven with a screen printed PZT actuator", J. Micromech. Microeng, 8, pp.119~122 (1998)
- S. P. Beeby, "Thick film PZT-silicon micromechanical resonater", Electron. Lett, 36, pp.1661~1662 (2000)
- D. A. Rarrow, "Characterization of thick PZT films fabricated using a new sol based process", J. Appl Phys, 81, pp.876~881 (1997)
- Y. L. Tu, "A study of the effects of process variable on the properties of PZT films produced by a single-layer sol-gel technique", J. mater. Sci, 30(10), pp.2507~2516 (1995)
- W.-J. Yoon, "Sensor materials & processes : the characteristics of PbTiO₃- PbZrO₃-Pb(Ni⅓Nb⅔)O₃ piezoelectric thin film made by sol - gel method", 센서학회지, pp.75~80 (1995)
- M. Koch, "A novel micropump design with thick film piezoelectric actuation", Meas. Sci. Technol, 8, pp.49~ (1998)
- A. Schroth, "Application of gas jet deposition method to piezoelectric thick film miniature actuator", J. Appl. Phys, 37, pp.5342~5344 (1998)
- D. A. Barrow, "Thick ceramic coatings using a sol gel based ceramic 0-3 composite", Surface and Coatings Technology, 76-77, pp.113~118 (1995)
- W.-S. Jang;S.-S. Kim;C.-Y. Kang, "The Properties of screen printed piezoelectric thick film actuators on si-membrane", 석사, pp.2006
- Y.-B. Kim, "Preparation of PZT(52", 48) piezoelectric thick film by screen printing method, 2001, pp.38, 724~731
- S.-J. Kim, "Characteristic of PMWPNN- PT-PZ thick films on various bottom electrodes", J. of Electroceramics, 1, pp.495~498 (2006)
- S.-J. Kim, "Low temperature sintering of ZnO-doped 0.01Pb (Mg½W½)O-0.41Pb(Ni⅓Nb⅔) O₃-0.35PbTiO₃-0.23PbZrO₃ ceramics", Jpn. J. Appl. Phys, 46, pp.276~279 (2007)
- S.-H. Lee, "Particle size and piezoelectric characteristics of PNW-PMN-PZT ceramics as a function of attrition milling process", 한국전기전자재료학회 2003년도 추계학술대회 논 문집 (2003)
- David C. C. Lam, "Effect of paricle size distribution shape on composite packing density of bimodal mixture", J. Ceram. Soc. Jpn, 102(2), pp.133~138 (1994)
- S. Taruta, "Influence of coarse particle size on packing and sintering behavior of bimodal size distributed alumina power mixture", J. Ceram. Soc. Jpn, 101(5), pp.583~588 (1993)