플렉시블 디스플레이 적용을 위한 ITO:Ce / PET 박막의 물성평가
Characteristics of ITO:Ce / PET Films for Flexible Display Applications
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ITO and ITO:Ce films were deposited by DC magnetron sputtering using an ITO (SnO2: 10 wt%) and CeO2 doped ITO (CeO2: 0.5, 3.0, 4.0 and 6.0 wt%) ceramic targets, respectively, on unheated polyethylene terephthalate (PET) substrates. The lowest resistivity 6.7 x 10-4 Ωcm was obtained from ITO:Ce film deposited using CeO2 (3.0wt%) doped ITO target. On the other hand, ITO:Ce (0.5wt%) film has the excellent mechanical durability which was evaluated by bending test. This result was attributed to the higher binding energy of CeO2 compared to SnO2 and In2O3. Therefore, CeO2 atoms have a small displacement caused by the bombardment of high energy particles, and it attribute to the increase in adhesion caused by decrease in internal stress. The average transmittance of the films was more than 80% in the visible region.
Abstract
ITO and ITO:Ce films were deposited by DC magnetron sputtering using an ITO (SnO2: 10 wt%) and CeO2 doped ITO (CeO2: 0.5, 3.0, 4.0 and 6.0 wt%) ceramic targets, respectively, on unheated polyethylene terephthalate (PET) substrates. The lowest resistivity 6.7 x 10-4 Ωcm was obtained from ITO:Ce film deposited using CeO2 (3.0wt%) doped ITO target. On the other hand, ITO:Ce (0.5wt%) film has the excellent mechanical durability which was evaluated by bending test. This result was attributed to the higher binding energy of CeO2 compared to SnO2 and In2O3. Therefore, CeO2 atoms have a small displacement caused by the bombardment of high energy particles, and it attribute to the increase in adhesion caused by decrease in internal stress. The average transmittance of the films was more than 80% in the visible region.
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