3차원 입자 모델을 이용한 마그네트론 스퍼터링 음극의 특성 분석
Characterization of a Magnetron Sputtering Cathode by a 3D Particle Model
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초록
A 3D particle code is developed to analyze electron behavior in a planar magnetron sputtering cathode either in balanced or unbalanced configuration. Three types of collisions are included; electron - neutral elastic, excitation to a metastable state and ionization. Flight path is calculated by a 4-th order Runge-Kutta method with a time step of 10 ps. Effects of electron starting position, magnetic field intensity and configuration were analyzed. For a more efficient and accurate modeling, multithreading technique is considered for multi-core CPU computers. Under an assumption of cold ion approach, target erosion profiles are predicted for a flat target surface.
Abstract
A 3D particle code is developed to analyze electron behavior in a planar magnetron sputtering cathode either in balanced or unbalanced configuration. Three types of collisions are included; electron - neutral elastic, excitation to a metastable state and ionization. Flight path is calculated by a 4-th order Runge-Kutta method with a time step of 10 ps. Effects of electron starting position, magnetic field intensity and configuration were analyzed. For a more efficient and accurate modeling, multithreading technique is considered for multi-core CPU computers. Under an assumption of cold ion approach, target erosion profiles are predicted for a flat target surface.
참고문헌 (10)
- Q. Fan, , J. Phys. D: Appl. Phys, 36, pp.244~ (2003)
- T. E. Sheridan, , J. Vac. Sci. Technol, A8, pp.30~ (1990)
- A. Wendt, , J. Vac. Sci .Technol, A6, pp.1827~ (1988)
- S. Kondo, , J. Phys. D: Appl. Phys, 32, pp.1142~ (1999)
- J. Phillips, "High performance computing with CUDA:Molecular Dynamics", University of Illinois at Urbana-Champagne (2007)
- S. Brown, "Basic data of plasma physics", pp.230~ (1994), American Vacuum Society AIP press
- S. N. Nahar, , Phy. Rev A, 35, pp.2051~ (1987)
- M. H. Kalos, "Monte Carlo Methods Volume I: Basics", pp.61~ (1986), John Wiley & Sons
- J. O'Brien, , Surf. Coat. Technol, 142-144, pp.621~ (2001)
- J. W. Bradley, , Surf. Coat. Technol, 135, pp.221~ (2001)