마그네트론 스퍼터링법으로 제조된 ZnO/Cu/Al2O3 투명 면상 발열체 연구
ZnO/Cu/Al2O3 transparent heaters fabricated by magnetron sputtering
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Herein, we studied ultrathin Cu-layer-based transparent heaters embedded between a ZnO underlayer and an Al2O3 overlayer. The anti-reflecting functions for the ZnO and Al2O3 layers by independently varying the layer thicknesses, with the Cu layer thickness fixed at 8.5 nm. The smallest visible light transmittance of 11.1% was achieved when the overlayer and underlayer thicknesses were 90 and 30 nm, respectively. We conducted electrically driven Joule heating test for the Cu layers having thicknesses of 8.5 nm (Rs: 14.7 Ohm/sq.) and 19 nm (Rs: 3.4 Ohm/sq.). External voltages were increased with an interval of 2 V until irreversible failures occurred at temperatures of ~390 ℃ and 550 ℃, respectively. At each voltage increase before heater failures, the heater exhibited superior thermal response with the heater temperatures reaching over 90% of the final temperatures. The heaters also showed excellent reproducibility when turning on and off the heater repeatedly.
Abstract
Herein, we studied ultrathin Cu-layer-based transparent heaters embedded between a ZnO underlayer and an Al2O3 overlayer. The anti-reflecting functions for the ZnO and Al2O3 layers by independently varying the layer thicknesses, with the Cu layer thickness fixed at 8.5 nm. The smallest visible light transmittance of 11.1% was achieved when the overlayer and underlayer thicknesses were 90 and 30 nm, respectively. We conducted electrically driven Joule heating test for the Cu layers having thicknesses of 8.5 nm (Rs: 14.7 Ohm/sq.) and 19 nm (Rs: 3.4 Ohm/sq.). External voltages were increased with an interval of 2 V until irreversible failures occurred at temperatures of ~390 ℃ and 550 ℃, respectively. At each voltage increase before heater failures, the heater exhibited superior thermal response with the heater temperatures reaching over 90% of the final temperatures. The heaters also showed excellent reproducibility when turning on and off the heater repeatedly.
참고문헌 (21)
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