동시 스퍼터링법에 의해 금속을 도핑한 TiO2 광학 박막의 특성
Characteristics of TiO2 and Ag/TiO2 optical thin film by Co-sputtering method
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초록
고주파 마그네트론 동시 스퍼터링법을 이용하여 TiO2 박막에 Ag를 도핑한 Ag/TiO2 박막을 제작하고, 열처리 온도에 따른 박막의 물리적, 화학적 특성을 조사하였다. XRD 측정 결과로부터 금속을 도핑한 박막이 순수 TiO2 박막보다 결정크기가 더 작은 것을 확인하였으며, SEM 측정 결과로부터 Ag/TiO2 박막은 순수 TiO2 박막보다 입자의 크기가 작고 균일하다는 것을 알 수 있었다. 제작된 박막은 가시광선 영역에서 높은 투과율을 나타내었다. 600℃에서 열처리한 박막은 아나타제 결정상이 나타났으며, 900℃에서 열처리한 박막은 아나타제와 루타일상이 혼합되어 나타났다. 특히, 900℃에서 열처리한 경우 아나타제에서 루타일로의 상전이에 따른 밴드갭 에너지의 변화에 의해 박막의 흡수단이 장파장 영역으로 이동하였다. 또한 박막 내의 흡수와 산란효과에 의해 투과율이 감소하였다. Ag/TiO2 박막의 광활성은 순수 TiO2 박막보다 우수함을 알 수 있었다.
Abstract
Ag-doped TiO2 thin films were prepared by RF magnetron co-sputtering method, and their physical and chemical properties were examined as a function of calcination temperature. XRD results showed that the crystallite size of Ag-doped films was smaller than that of the TiO2 thin films. SEM results showed that the particle size of Ag/TiO2 film was smaller and more uniform than pure TiO2 film. The films had high transparency in the visible range. The films calcined at 600℃ were the anatase phase, and the films calcined at 900℃ were a mixture of anatase and rutile phases. The absorption edge of films calcined at 900℃ was red-shifted. This is due to the augmented absorption resulting from the phase transformation from anatase to rutile phase. And the transmittance of films decreased by the light scattering and absorption in the films. Photocatalytic activity of Ag/TiO2 thin films was higher than that of the pure TiO2 thin films.
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