Thermal oxidation temperature effect on the phases and photocatalytic properties of silver-doped TiO2 thin film prepared by co-sputtering
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Titanium dioxide thin films with silver dopant (Ag-TiO2) were successfully prepared on glass substrates using the thermaloxidation method. Ag-doped titanium films were prepared using direct current (DC) and radio frequency (RF) magnetron cosputteringsystems. The thermal oxidation temperature and Ag content effects on the phase evolution, microstructure, andphoto catalytic activity of TiO2 film were studied. The crystalline structures and photo catalytic activity of the annealed AgdopedTiO2 films were methodically investigated using transmission electron microscopy (TEM), field emission scanningelectron microscopy (FESEM), X-ray diffraction (XRD), and ultraviolet spectrophotometry. The results exhibited that thethermal oxidation process at 550 oC clearly caused rutile phase formation in the 2.7% Ag-doped TiO2 films directly affectingthe photo catalytic activity. The Ag-doped TiO2 films showed good photo catalytic activity under UV-light radiation, with 59%methylene blue dye degradation rate.
Abstract
Titanium dioxide thin films with silver dopant (Ag-TiO2) were successfully prepared on glass substrates using the thermaloxidation method. Ag-doped titanium films were prepared using direct current (DC) and radio frequency (RF) magnetron cosputteringsystems. The thermal oxidation temperature and Ag content effects on the phase evolution, microstructure, andphoto catalytic activity of TiO2 film were studied. The crystalline structures and photo catalytic activity of the annealed AgdopedTiO2 films were methodically investigated using transmission electron microscopy (TEM), field emission scanningelectron microscopy (FESEM), X-ray diffraction (XRD), and ultraviolet spectrophotometry. The results exhibited that thethermal oxidation process at 550 oC clearly caused rutile phase formation in the 2.7% Ag-doped TiO2 films directly affectingthe photo catalytic activity. The Ag-doped TiO2 films showed good photo catalytic activity under UV-light radiation, with 59%methylene blue dye degradation rate.
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