반도체 장비 데이터 통신 네트워크의 성능평가에 관한 연구
Performance Evaluation of Semiconductor Equipment Data Communication Network
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초록
반도체 산업에서 제조비용을 최소화하고 생산성과 수율을 보다 향상시키기 위해서는 새로운 공정기술의 개발뿐만 아니라 효과적인 장비 운영·관리기술의 개발과 적용이 필요하다(박유진과 황하란, 2013). 따라서 보다 효율적으로 반도체 생산장비를 운영하고 관리하기 위해 모든 반도체 관련 업체들은 다양한 활동을 지속적으로 수행하고 있다. 효율적인 장비 운영·관리를 위해서는 반도체 생산장비와 운영(제어)시스템간 또는 반도체 생산장비간의 데이터 통신 네트워크 성능은 매우 높아야 한다. 특히 차세대 반도체 웨이퍼인 450mm 웨이퍼 생산체제로 전환 시, 생산장비와 운영(제어)시스템에서 발생하는 다양한 형태의 대용량 데이터를 안정적으로 수집·관리하고, 이를 제어하기 위한 시스템을 구축하는데 많은 노력을 기울이고 있다. 따라서 본 연구에서는 반도체 장비 데이터 통신 네트워크의 성능을 나타내는 여섯 가지 지표와 이러한 지표들에 영향을 미치는 세 가지 운영 변수들을 고려하여 통신 네트워크의 성능지표와 운영 변수들의 관계를 통계적으로 모형화한 후, 만족도 함수 최적화기법과 여러 탐색적 알고리즘들을 이용하여 통신 네트워크 성능을 평가하고 이를 통해 효과적인 네트워크 운영방안을 제시하고자 한다.
Abstract
In semiconductor industries, in order to improve productivity and yield, and also to minimize the production cost, it is necessary to develop effective operation and control techniques as well as to develop noble process technologies. So, semiconductor industries are carrying out diverse activities consistently for managing semiconductor process equipment efficiently. For efficient operation and control of semiconductor process equipment, performance of the data communication network between process equipment and the corresponding operating system or among process equipment must be highly excellent. In particular, when moving toward 450mm wafer fabrication system, semiconductor industries are trying to construct an organized system that collects and controls various and big-sized data generated from both equipment and operating system stably. Thus, in this research, after statistically modeling the relationship between key performance factors of communication network in semiconductor manufacturing system and operating parameters which influence key performance factors, we evaluate the performance of communication network and then propose effective network operating strategy using both desirability function optimization method and efficient heuristic algorithms.
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