Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method
2
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
Zinc oxide (ZnO) thin films were prepared by a sol-gel method. The structural and electrical properties were investigated by varying drying and annealing temperatures. The thin films were coated (250 nm) by spin-coating method on glass substrates. The optimum drying temperature of ZnO thin films was 300℃ where the resistivity was the lowest and the preferred c-axis orientation was the highest. The annealing was carried out in air and inert atmospheric conditions. The degree of the preferred c-axis orientation was estimated. The highest preferred c-axis orientation was recorded at 600℃. The preferred c-axis orientation and grain growth resulted in the mobility enhancement of the ZnO thin films, and the lowest resistivity was 0.62 Ω·cm at 600℃.
Abstract
Zinc oxide (ZnO) thin films were prepared by a sol-gel method. The structural and electrical properties were investigated by varying drying and annealing temperatures. The thin films were coated (250 nm) by spin-coating method on glass substrates. The optimum drying temperature of ZnO thin films was 300℃ where the resistivity was the lowest and the preferred c-axis orientation was the highest. The annealing was carried out in air and inert atmospheric conditions. The degree of the preferred c-axis orientation was estimated. The highest preferred c-axis orientation was recorded at 600℃. The preferred c-axis orientation and grain growth resulted in the mobility enhancement of the ZnO thin films, and the lowest resistivity was 0.62 Ω·cm at 600℃.
참고문헌 (14)
- R.G. Gordon, "Criteria for choosing transparent conductors", MRS Bull, 25(8), pp.52~ (2000)
- I. Stambolova, "Lanthanum doped SnO2 and ZnO thin films sensitive to ethanol and humidity", Mater. Chem. Phys, 63, pp.104~ (2000)
- M. Benetti, "Structural and piezoelectric properties of pulsed laser deposited ZnO thin films", Superlattices Microstruct, 39, pp.366~ (2006)
- M. Chen, "ZAO: an attractive potential substitute for ITO in flat display panels", Mater. Sci. Eng. B, 85, pp.212~ (2001)
- T. Pauporté, "Electrodeposition of Semi conductors foroptoelectronic devices: result on znic oxide", Electrochim. Acta, 45, pp.3345~ (2000)
- Y. Yamamoto, "Preparation of boron-doped ZnO thin films by photoatomic layer deposition", Sol. Energ. Mater. Sol. Cells, 65, pp.125~ (2001)
- D. Song, "Investigation of lateral parameter variations of Aldoped znic oxide films prepared on glass substrates by rf magnetron sputtering", Sol. Energ. Mater. Sol. Cells, 73, pp.1~ (2002)
- B.M. Ataev, "Thermally stable, highly conductive, and transparent ZnO layers prepared in situ by chemical vapor deposition", J. Cryst. Growth, 198-199, pp.1222~ (1999)
- T.Y. Ma, "Effects of aluminum content and substrate temperature on the structural and electrical properties of aluminum-doped ZnO films prepared by ultrasonic spray pyrolysis", J. Mater. Sci. Mater. Electron, 11, pp.305~ (2000)
- J.H. Lee, "Electrical and optical properties of ZnO transparent conducting films by the sol-gel method", J. Cryst. Growth, 247, pp.119~ (2003)
- Y.S. Kim, "Effect of preheating temperature on structural and optical properties of ZnO thin films by sol-gel process", Thin Solid Films, 491, pp.153~ (2005)
- S. Fujihara, "Crystallization behavior and origin of c-axis orientation in sol-gelderived ZnO : Li thin films on glass substrates", Appl. Surf. Sci, 180, pp.341~ (2001)
- S. Major, "Annealing studies of undoped and indium-doped films of zinc oxide", Thin Solid Films, 122, pp.31~ (1984)
- K. Ogata, "Effects of thermal annealing of ZnO layers grown by MBE", J. Cryst. Growth, 214-215, pp.312~ (2000)