전력반도체의 수율향상을 위한 최적 공정조건 결정에 관한 연구
Process Conditions Optimizing the Yield of Power Semiconductors
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초록
Purpose: We used a data analysis method to improve semiconductor manufacturing yield. We defined and optimized important factors and applied our findings to a real-world process. The semiconductor industry is very cost-competitive; our findings are useful. Methods: We collected data on 15 independent variables and one dependent variable (yield); we removed outliers and missing values. Using SPSS Modeler ver. 18.0, we analyzed the data both continuously and discretely and identified common factors. Results: We optimized two independent variables in terms of process conditions; yield improved. We used DS Leak software to model netting and Contact CD software to model meshes. DS Leak shows smaller the better characterisrics and Contact CD shows normal the best characteristics Conclusion: Various efforts have been made to improve semiconductor manufacturing yields, and many studies have created models or analyzed various characteristics. We not only defined important factors but also showed how to control processing to improve semiconductor yield.
Abstract
Purpose: We used a data analysis method to improve semiconductor manufacturing yield. We defined and optimized important factors and applied our findings to a real-world process. The semiconductor industry is very cost-competitive; our findings are useful. Methods: We collected data on 15 independent variables and one dependent variable (yield); we removed outliers and missing values. Using SPSS Modeler ver. 18.0, we analyzed the data both continuously and discretely and identified common factors. Results: We optimized two independent variables in terms of process conditions; yield improved. We used DS Leak software to model netting and Contact CD software to model meshes. DS Leak shows smaller the better characterisrics and Contact CD shows normal the best characteristics Conclusion: Various efforts have been made to improve semiconductor manufacturing yields, and many studies have created models or analyzed various characteristics. We not only defined important factors but also showed how to control processing to improve semiconductor yield.
참고문헌 (12)
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