본문 바로가기
KERD
논문KCI 등재

군집분석 및 반응표면분석법을 활용한 반도체 공정 수율향상에 관한 연구

Improving the Yield of Semiconductor Manufacturing Processes using Clustering Analysis and Response Surface Method

0

조회

0

다운로드

3

인용

0

참고문헌

키워드

주제분류학제간연구

초록

Purpose: This study aims to conduct a systematic literature review to suitably identify wide and specific issues and topics on service quality in supply chain. Methods: This study is to investigate service quality in supply chain research using a systematic literature review methodology. In order to extract influential journals and papers, we used the SJR impact factor provided by the SCOPUS database. The collected 169 papers were analyzed using bibliometric analysis, citation analysis as well as keywords network. Results: We conducted a bibliometric analysis to identify top authors contributing to service quality in supply chain and their issues, and further examined important keywords and new emerging keywords. In addition, we extracted five influential papers by PageRank to clarify critical issues and divided into five clusters to identify topics of service quality in supply chain by using network-based approach. In order to examine comprehensive issues and topics of service quality in supply chain, we constructed a keyword network to observe difference in the classification of important keywords across network centrality measures. Conclusion: Our study reviewed literature on service quality in supply chain and explored the future directions and trends of service quality in supply chain.

Abstract

Purpose: This study aims to conduct a systematic literature review to suitably identify wide and specific issues and topics on service quality in supply chain. Methods: This study is to investigate service quality in supply chain research using a systematic literature review methodology. In order to extract influential journals and papers, we used the SJR impact factor provided by the SCOPUS database. The collected 169 papers were analyzed using bibliometric analysis, citation analysis as well as keywords network. Results: We conducted a bibliometric analysis to identify top authors contributing to service quality in supply chain and their issues, and further examined important keywords and new emerging keywords. In addition, we extracted five influential papers by PageRank to clarify critical issues and divided into five clusters to identify topics of service quality in supply chain by using network-based approach. In order to examine comprehensive issues and topics of service quality in supply chain, we constructed a keyword network to observe difference in the classification of important keywords across network centrality measures. Conclusion: Our study reviewed literature on service quality in supply chain and explored the future directions and trends of service quality in supply chain.

참고문헌 (14)

  1. 안대웅, "SSVM(Stepwise-Support Vector Machine)을 이용한 반도체 수율 예측", 산업공학(IE interfaces), 22(3), pp.252~262 (2009), 대한산업공학회
  2. 백동현, "데이터마이닝을 이용한 반도체 FAB공정의 수율개선 및 예측", 지능정보연구, 9(1), pp.157~177 (2003), 한국지능정보시스템학회
  3. Chien, C. F., "Datamining for yield enhancement in semiconductor manufacturing and an empirical study", Expert Systems with Applications, 33(1), pp.192~198 (2007)
  4. 정찬홍, "사파이어 웨이퍼 CMP 공정 신뢰성 향상을 위한 혼합 나노실리카 콜로이달 슬러리", 신뢰성 응용연구, 14(1), pp.11~19 (2014), 한국신뢰성학회
  5. Cunningham, S. P., "Semiconductor yield improvement: results and best practices, Semiconductor Manufacturing", IEEE Transactions on Semiconductor Manufacturing, 8(2), pp.103~109 (1995)
  6. Hsu, S-C., "Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing", International Journal of Production Economics, 107(1), pp.88~103 (2007)
  7. Krueger, D. C., "Applocation of Generalized Linear Models to Predict Semiconductor Yield Using Defect Metrology Data", IEEE Transactions on Semiconductor Manufacturing, 24(1), pp.44~58 (2011)
  8. 이동헌, "실험계획법을 이용한 전자부품 위치정렬장치 최적 운영조건 사례연구", 품질경영학회지, 43(3), pp.453~466 (2015), 한국품질경영학회[DOI]
  9. 이승미, "점하중시험법에 의한 반도체 기판용 실리콘 웨이퍼의 파괴강도 평가", 신뢰성 응용연구, 16(1), pp.26~31 (2016), 한국신뢰성학회
  10. Lee, W. S, "Multi-response Optimization by a Response Surface Approach for a Taguchi-Type Multi-charateristic Experiments", Journal of Applied Reliability, 4(1), pp.39~64 (2004)
  11. 남완식, "반도체 제조 가상계측 공정변수를 이용한 웨이퍼 수율 예측", 대한산업공학회지, 41(6), pp.572~578 (2015), 대한산업공학회[DOI]
  12. 박철홍, "반응표면법을 이용한 시멘트 소성공정 대기오염물질 배출량 최적화 연구", 신뢰성 응용연구, 18(4), pp.356~369 (2018), 한국신뢰성학회[DOI]
  13. Shin, C. K., "A machine learning approach to yield management in semiconductor manufacturing", International Journal of Production Research, 38(17), pp.4261~4271 (2000)
  14. Sohn, S. Y., "Probe test yield optimization based on canonical correlation analysis between process control monitoring variables and probe bin variables", Expert Systems with Applications, 39(4), pp.4377~4382 (2012)

관련 논문AI추천

이 간행물의 다른 논문 (10건)