Poly(dimethylsiloxane) 미세 구조물의 신속한 기하학적 패터닝
Rapid Topological Patterning of Poly(dimethylsiloxane) Microstructure
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초록
We presented the modified decal-transfer lithography (DTL) and light stamping lithography (LSL) as new powerful methods to generate patterns of poly(dimethylsiloxane) (PDMS) on the substrate. The microstructures of PDMS fabricated by covalent binding between PDMS and substrate had played as barrier to locally control wettability. The transfer mechanism of PDMS is cohesive mechanical failure (CMF) in DTL method. In the LSL method, the features of patterned PDMS are physically torn and transferred onto a substrate via UV-induced surface reaction that results in bonding between PDMS and substrate. Additionally we have exploited to generate the patterning of rhodamine B and quantum dots (QDs), which was accomplished by hydrophobic interaction between dyes and PDMS micropatterns. The topological analysis of micropatterning of PDMS were performed by atomic force microscopy (AFM), and the patterning of rhodamine B and quantum dots was clearly shown by optical and fluorescence microscope. Furthermore, it could be applied to surface guided flow patterns in microfluidic device because of control of surface wettability. The advantages of these methods are simple process, rapid transfer of PDMS, modulation of surface wettability, and control of various pattern size and shape. It may be applied to the fabrication of chemical sensor, display units, and microfluidic devices.
Abstract
We presented the modified decal-transfer lithography (DTL) and light stamping lithography (LSL) as new powerful methods to generate patterns of poly(dimethylsiloxane) (PDMS) on the substrate. The microstructures of PDMS fabricated by covalent binding between PDMS and substrate had played as barrier to locally control wettability. The transfer mechanism of PDMS is cohesive mechanical failure (CMF) in DTL method. In the LSL method, the features of patterned PDMS are physically torn and transferred onto a substrate via UV-induced surface reaction that results in bonding between PDMS and substrate. Additionally we have exploited to generate the patterning of rhodamine B and quantum dots (QDs), which was accomplished by hydrophobic interaction between dyes and PDMS micropatterns. The topological analysis of micropatterning of PDMS were performed by atomic force microscopy (AFM), and the patterning of rhodamine B and quantum dots was clearly shown by optical and fluorescence microscope. Furthermore, it could be applied to surface guided flow patterns in microfluidic device because of control of surface wettability. The advantages of these methods are simple process, rapid transfer of PDMS, modulation of surface wettability, and control of various pattern size and shape. It may be applied to the fabrication of chemical sensor, display units, and microfluidic devices.
참고문헌 (20)
- Wallraff G. M, "Lithographic Imaging Techniques for the Formation of Nanoscopic Features", Chem. Rev, 통권 : 99, pp.1801~1822 (1999)
- Beebe D. J, "Microfluidic tectonics: A comprehensive construction platform for microfluidic systems", Proc. Natl. Acad. Sci, 통권 : 97, pp.13488~13493 (2000)
- Yao J. J, "RF MEMS from a device perspective", J. Micromech. Microeng, 통권 : 10, pp.R9~R38 (2000)
- Walker J. A, "The future of MEMS in telecommunications networks", J. Micromech. Microeng, 통권 : 10, pp.R1~R7 (2000)
- Beebe D. J, "Physics and applications of microfluidics in biology", Annu. Rev. Biomed. Eng, 통권 : 4, pp.261~286 (2002)
- Xia Y, "Unconventional Methods for Fabricating and Patterning Nanostructures", Chem. Rev, 통권 : 99, pp.1823~1848 (1999)
- Xia. Y, "Soft Lithography", Angew. Chem. Int. Ed. Engl, 통권 : 37, pp.550~575 (1998)
- Kane, R. S, "Patterning Proteinsand Cells using Soft Lithography", Biomaterials, 통권 : 20, pp.2363~2376 (1999)
- Quist, A. P, "Recent Advances in Microcontact Printing", Analytical and Bioanalytical Chemistry, 통권 : 381, pp.591~600 (2005)
- Kumar A, "The use of self-assembled monolayers and a selective etch to generate patterned gold features", J. Am. Chem. Soc, 통권 : 114, pp.9188~9189 (1992)
- Kumar A, "Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ``ink'' followed by chemical etching", Appl. Phys. Lett, 통권 : 63, pp.2002~2004 (1993)
- Kumar A, "Patterning Self-Assembled Monolayers: Applications in Materials Science", Langmuir, 통권 : 10, pp.1498~1511 (1994)
- Childs W. R, "Decal Transfer Microlithography: A New Soft-Lithographic Patterning Method", J. Am. Chem. Soc, 통권 : 124, pp.13583~13596 (2002)
- Childs W. R, "Patterning of Thin-Film Microstructures on Non-Planar Surfaces Using Decal Transfer Lithography", Adv. Mater, 통권 : 16, pp.1323~1327 (2004)
- Childs W. R, "Large-Area Patterning of Coinage-Metal Thin Film Using Decal Transfer Lithography", Langmuir, 통권 : 21, pp.195~202 (2005)
- K. S. Park, "Light Stamping Lithography: Microcontact Printing without Inks", J. Am. Chem. Soc, 통권 : 128, pp.858~865 (2006)
- L. Qu, "Alternative Routes toward High Quality CdSe Nanocrystals", Nano Lett, 통권 : 1, pp.333~337 (2001)
- Z. A. Peng, "Formation of High- Quality CdTe, CdSe, and CdS Nanocrystals Using CdO as Precursor", J. Am. Chem. Soc, 통권 : 123, pp.183~184 (2001)
- H. W. Shim, "Microcontact printing of bacteria using hybrid agarose gel stamp", Korean J. Biotechnol. Bioeng, 통권 : 21, pp.325~330 (2006)
- Z. Zheng, "Topography Printing to Locally Control Wettability", J. Am. Chem. Soc, 통권 : 128, pp.7730~7731 (2006)