탄성 중합체 변형을 통한 패턴 변화 특성 연구
Characterization in Contol of Pattern Gap using Elastomer Deformation
0
조회
0
다운로드
1
인용
0
참고문헌
키워드
초록
In this study, controlling pattern gap was induced by deformation of the stretchable substrate. The pre-fabricated pattern was made by depositing an Au(gold) on the Si substrate, and PDMS(Polydimethylsiloxane) was used for the stretchable substrate in consideration of surface energy, formability, and viscoelastic characteristics. For uniform deformation of PDMS, it is manufactured in the form of a tensile specimen using a molding method. An external force is applied to the deformable substrate in the uni-axial direction using a self-manufactured JIG, and the Au thin film pattern is transferred to the substrate under tensile state. After that, the external force is removed, and the PDMS specimen is recovered to its initial state. At this time, it can be seen that the pre-fabricated pattern gap is shortened from the initial size due to the viscoelastic properties of the PDMS. As a result, it was characterized to deformation rate of the pattern gap according to elongation rate of PDMS.
Abstract
In this study, controlling pattern gap was induced by deformation of the stretchable substrate. The pre-fabricated pattern was made by depositing an Au(gold) on the Si substrate, and PDMS(Polydimethylsiloxane) was used for the stretchable substrate in consideration of surface energy, formability, and viscoelastic characteristics. For uniform deformation of PDMS, it is manufactured in the form of a tensile specimen using a molding method. An external force is applied to the deformable substrate in the uni-axial direction using a self-manufactured JIG, and the Au thin film pattern is transferred to the substrate under tensile state. After that, the external force is removed, and the PDMS specimen is recovered to its initial state. At this time, it can be seen that the pre-fabricated pattern gap is shortened from the initial size due to the viscoelastic properties of the PDMS. As a result, it was characterized to deformation rate of the pattern gap according to elongation rate of PDMS.
참고문헌 (17)
- Adrega, T., "Stretchable gold conductors embedded in PDMS and patterned by photolithography: Fabrication and electromechanical characterization", Journal of Micromechanics and Microengineering, 20(5) (2010)
- Hyun-ju Choi, "A study on estimating elastic modulus of nano-scale metal thin films on a polymeric substrate", The Korean Society of Mechanical Engineers (2007)
- Hyun-Ju Choi, "A study on mechanical characterization of nano-thick films fabricated by transfer assembly technique", The Korean Society of Mechanical Engineers (2008)
- Samuel Yu, "Contact Guidance of Cells using the Micro", Nanopatterns Created by Stretching Plasma Treated PDMS Membrane, 2011, ~
- Jae Won Jeong, "High-resolution nanotransfer printing applicable todiverse surfaces via interface- targeted adhesionswitching", nature commuinications (2014)
- 김건휘, "Poly-dimethylsiloxane (PDMS) 기판 위에 형성된 나노구조를 이용한 시각 인장센서의 개발", 센서학회지, 27(6), pp.392~396 (2018), 한국센서학회[DOI]
- Ikjoo Byun, "SAM meets MEMS: reliable fabrication of stable Au-patterns embedded in PDMS using dry peel-off process", Microsystem Technologies, 20(10-11), pp.1783~1789 (2013), Springer Science and Business Media LLC[DOI]
- Dongil Chu, "Recent Advances in Synthesis and Assembly of van der Waals Materials", Journal of the Korean Physical Society, 73(6), pp.805~816 (2018), 한국물리학회
- Ikjoo Byun, "Transfer of thin Au films to polydimethylsiloxane (PDMS) with reliable bonding using (3-mercaptopropyl)trimethoxysilane (MPTMS) as a molecular adhesive", Journal of Micromechanics and Microengineering, 23(8), pp.085016~ (2013), IOP Publishing[DOI]
- 이원재, "PDMS-Ecoflex 하이브리드 소재를 이용한 투명 신축성 기판의 기계적 및 광학적 특성", 마이크로전자 및 패키징학회지, 25(4), pp.129~135 (2018), 한국마이크로전자및패키징학회
- Ung-Hui Shin, "Highly stretchable conductors and piezocapacitive strain gauges based on simple contact-transfer patterning of carbon nanotube forests", Carbon, 80, pp.396~404 (2014), Elsevier BV[DOI]
- Min-Soo Ghim, "Experiments of surface energy changewith respect to strain of patterned PDMS", The Korean Society of Mechanical Engineers, pp.3747~3751 (2013)
- Chi Hwan Lee, "Fabricating nanowire devices on diverse substrates by simple transfer-printing methods", Proceedings of the National Academy of Sciences, 107(22), pp.9950~9955 (2010), Proceedings of the National Academy of Sciences[DOI]
- Junyong Park, "Three-dimensional nanonetworks for giant stretchability in dielectrics and conductors", Nature Communications, 3(1) (2012), Springer Science and Business Media LLC[DOI]
- Debashis Maji, "Buckling assisted and lithographically micropatterned fully flexible sensors for conformal integration applications", Scientific Reports, 5(1) (2015), Springer Science and Business Media LLC[DOI]
- 이동렬, "PDMS 박막 형상에 따른 열공압형 미세 펌프 내의 유동해석", 한국기계기술학회지, 17(2), pp.245~250 (2015), 한국기계기술학회[DOI]
- 오병윤, "Fabrication of Aligned Nano Patterns on HfZnO based on the Imprinting Method for Liquid Crystal Display", 한국기계기술학회지, 21(3), pp.505~509 (2019), 한국기계기술학회[DOI]