사진식각공정과 물방울 형틀을 이용한 PDMS 렌즈 제작
Fabrication of PDMS Lens Using Photolithography and Water Droplet Mold
0
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
We developed a novel fabrication method of polydimethylsioxane (PDMS) lens, which can easily control the shapes of the lens using soft lithography with common photolithography and water droplet molding. A mold for PDMS lens was prepared by patterning of hydrophobic photoresist on the hydrophilic substrate and dispensing small water droplets onto the predefined hydrophilic patterns. The size of patterns determined the dimension of the lens and the dispensed volume of the water droplet decided the radius of curvature of the PDMS lens independently. The water droplet with photoresist pattern played a robustly fixed mold for lens due to difference in wettability. The radius of curvature could be calculated theoretically because the water droplets could approximate spherical cap on the substrate. Finally, concave and convex PDMS lenses which could reduce or magnify optically were fabricated by curing of PDMS on the prepared mold. The measured radii of the fabricated PDMS lenses were well matched with the estimated values. We believe that our simple and efficient fabrication method can be adopted to PDMS microlens and extended to micro optical device, lab on a chip, and sensor technology.
Abstract
We developed a novel fabrication method of polydimethylsioxane (PDMS) lens, which can easily control the shapes of the lens using soft lithography with common photolithography and water droplet molding. A mold for PDMS lens was prepared by patterning of hydrophobic photoresist on the hydrophilic substrate and dispensing small water droplets onto the predefined hydrophilic patterns. The size of patterns determined the dimension of the lens and the dispensed volume of the water droplet decided the radius of curvature of the PDMS lens independently. The water droplet with photoresist pattern played a robustly fixed mold for lens due to difference in wettability. The radius of curvature could be calculated theoretically because the water droplets could approximate spherical cap on the substrate. Finally, concave and convex PDMS lenses which could reduce or magnify optically were fabricated by curing of PDMS on the prepared mold. The measured radii of the fabricated PDMS lenses were well matched with the estimated values. We believe that our simple and efficient fabrication method can be adopted to PDMS microlens and extended to micro optical device, lab on a chip, and sensor technology.
참고문헌 (10)
- 홍표환, "절연절단법을 이용한 프로브 빔의 제작", 센서학회지, 22(1), pp.89~94 (2013), 한국센서학회
- T. Itoh, "Characteristics of low force contact process for MEMS probe cards", Sens. Actuator A-Phys, 97, pp.462~467 (2002)
- T. Itoh, "Electroplated Ni microcantilever probe with electrostatic actuation", Sens. Actuator A-Phys, 123, pp.490~496 (2005)
- Y. Zhang, "Thermally actuated microprobes for a new wafer probe card", IEEE J. Microelectromech. Syst, 8(1), pp.43~49 (1999)
- F. Wang, "MEMS vertical probe cards with ultra densely arrayed metal probes for wafer-level IC testing", IEEE J. Microelectromech. Syst, 18(4), pp.933~941 (2009)
- C. J. Kim, "Fabrication of a MEMS-based fine-pitch cantilever-type probe unit", Proc. of IEEE Conf. on Sensors, pp.530~533 (2006)
- J. C. Yang, "Fabrication of a MEMS-based fine-pitch cnatilever-type probe unit", Proc. Intern. Microprocesses and Nanotechnology Conf, pp.328~329 (2006)
- S. H. Yoon, "Analysis of circular PDMS microballoons with ultralarge deflection for MEMS design", J. Microelectromech. Syst, 19(4), pp.854~864 (2010)
- O. C. Jeong, "All PDMS pneumatic microfinger with bidirectional motion and its application", J. Microelectromech. Syst, 15(4), pp.896~903 (2006)
- A. S. Nezhad, "PDMS microcantilever-based flow sensor integration for lab-on-a-chip", IEEE Sens. J, 13(2), pp.601~609 (2013)