SUS630 다이아프램을 이용한 반도체식 로드셀
The Silicon Type Load Cell with SUS630 Diaphragm
0
조회
0
다운로드
2
인용
0
참고문헌
키워드
초록
The load cell is a force sensor and a transducer that is used to convert a physical force into a electrical signal for weighing equipment. Most conventional load cells are widely used a metal foil strain gauge for sensing element when force being applied spring element in order to converts the deformation to electrical signals. The sensitivity of a load cell is limited by its low gauge factor, hysteresis and creep. But silicon-based sensors perform with higher reliability. This paper presents the basic design and development of the silicon type load cell with an SUS630 diaphragm. The load cell consists of two parts the silicon strain gauge and the SUS630 structure with diaphragm. Structure analysis of load cell was researched by theory to optimize the load cell diaphragm design and to determine the position of peizoresistors on a silicon strain gauge. The piezo-resistors are integrated in the four points of silicon strain gauge processed by ion implantation. The thickness of the silicon strain gauge was polished by CMP under 100 μm. The 10 mm diameter SUS630 diaphragm was designed for loads up to 10 kg with 300 μm of diaphragm thickness. The load cell was successfully tested, the variation of ΔR(%) of four points on the silicon strain gauge is good linearity properties and sensitivity.
Abstract
The load cell is a force sensor and a transducer that is used to convert a physical force into a electrical signal for weighing equipment. Most conventional load cells are widely used a metal foil strain gauge for sensing element when force being applied spring element in order to converts the deformation to electrical signals. The sensitivity of a load cell is limited by its low gauge factor, hysteresis and creep. But silicon-based sensors perform with higher reliability. This paper presents the basic design and development of the silicon type load cell with an SUS630 diaphragm. The load cell consists of two parts the silicon strain gauge and the SUS630 structure with diaphragm. Structure analysis of load cell was researched by theory to optimize the load cell diaphragm design and to determine the position of peizoresistors on a silicon strain gauge. The piezo-resistors are integrated in the four points of silicon strain gauge processed by ion implantation. The thickness of the silicon strain gauge was polished by CMP under 100 μm. The 10 mm diameter SUS630 diaphragm was designed for loads up to 10 kg with 300 μm of diaphragm thickness. The load cell was successfully tested, the variation of ΔR(%) of four points on the silicon strain gauge is good linearity properties and sensitivity.
참고문헌 (12)
- R. Wiegerink, "Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions", Sensors and Actuators A, 80(2), pp.189~196 (2000)
- N. M. White, "A planar thick-film load cell", Sensors and Actuators A, 26(1), pp.313~319 (1991)
- 김우정, "압저항형 압력센서를 이용한 초소형 하중센서의 개발", 센서학회지, 14(4), pp.237~243 (2005), 한국센서학회
- 김우정, "스테인레스 봉입형 반도체 압력센서의 제작 및 그 특성", 센서학회지, 11(3), pp.3~144 (2002), 한국센서학회
- S. H. Son, "Fabrication and temperature compensation of silicon piezoresistive absolute pressure sensor for gas leakage alarm system", J. Kor. Sensors Soc, 7(3), pp.171~178 (1998)
- S. C. Kim, "Temperature sensitivity in silicon piezoresistivity pressure transdusers", IEEE Transaction on Electron Devices, 30(7), pp.802~810 (1983)
- W. K. Schomburg, "The design of metal strain gauges on diaphragms", Micromechanics and Microengineering, 14(7), pp.1101~1108 (2004)
- S. P. Timoshenko, "Theory of plates and shells", pp.4~78 (1959), McGraw-Hill
- 한응교, "스트레인 게이지 : 이론과 응용", pp.18~32 (1976), 보성문화사
- Design consideration for diaphragm pressure transducers, "Vishay Micro-Measurements", Vishay, 1~5, pp.Tech note TN-510-1 (2005)
- S. M. Sze, "Semiconductor sensors", pp.153~185 (1990), A Wiley-Interscience Publication
- D. Tandeske, "Pressure sensors : Selection and application", pp.77~137 (1990), Marcel Dekker