초고압 압력센서용 다이어프램 설계 및 PZT 구동 변형시험기를 이용한 성능평가
Design of Diaphragm for Ultra High Pressure Sensors and Its performance Evaluation Using a PZT Actuated Deformation Tester
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초록
This research aims at designing a diaphragm made of SUS316L stainless steel for ultra high pressure sensors and eval- uating its performance with a PZT driven deformation tester instead of high pressure chamber testing up to 100 MPa. Finite element method analysis indicates that the optimum thickness of a flat diaphragm is 1.5 mm not only to secure safety of sensors up to 100 MPa but also to enhance displacement measuring sensitivity. For this thickness, the maximum dis- placement at the center of the diaphragm is 5.3 µm. The PZT actuator must offer a force of 1,669 N to create a pressure of 100 MPa at the diaphragm surface in order to obtain a displacement of 5.3 µm. The performance evaluation by the PZT driven tester demonstrates nearly the same results as the same results as the sensors tested in the ultra high pressure chamber.
Abstract
This research aims at designing a diaphragm made of SUS316L stainless steel for ultra high pressure sensors and eval- uating its performance with a PZT driven deformation tester instead of high pressure chamber testing up to 100 MPa. Finite element method analysis indicates that the optimum thickness of a flat diaphragm is 1.5 mm not only to secure safety of sensors up to 100 MPa but also to enhance displacement measuring sensitivity. For this thickness, the maximum dis- placement at the center of the diaphragm is 5.3 µm. The PZT actuator must offer a force of 1,669 N to create a pressure of 100 MPa at the diaphragm surface in order to obtain a displacement of 5.3 µm. The performance evaluation by the PZT driven tester demonstrates nearly the same results as the same results as the sensors tested in the ultra high pressure chamber.
참고문헌 (15)
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