ZnO/나노결정다이아몬드 적층 박막 SAW 필터
SAW Filter Made of ZnO/Nanocrystalline Diamond Thin Films
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A surface acoustic wave(SAW) filter structure was fabricated employing 4 μm thick nanocrystalline diamond(NCD) and 2.2 μm thick ZnO films on Si wafer. The NCD film was deposited in an Ar/CH4 gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and Ar/O2 gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer(IDT) electrode pattern (line/space : 1.5/1.5 μm) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.
Abstract
A surface acoustic wave(SAW) filter structure was fabricated employing 4 μm thick nanocrystalline diamond(NCD) and 2.2 μm thick ZnO films on Si wafer. The NCD film was deposited in an Ar/CH4 gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and Ar/O2 gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer(IDT) electrode pattern (line/space : 1.5/1.5 μm) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.
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