단결정 실리콘 제조용 석영유리도가니의 결정화에 대한 연구
Study on the crystallization of quartz glass crucibles for preparation of single crystal silicon
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초록
본 연구에서는 단결정 실리콘 제조수율에 영향을 미치는 것으로 알려진 석영도가니 표면의 불균일한 결정화를피하기 위해, 결정화촉진제로 Ba이 포함된 코팅용액을 제조하여 분무열분해법으로 코팅 후, 열처리에 따른 석영도가니 표면의 결정화를 조사하였고, 다음과 같은 결과를 얻었다. 코팅하지 않은 도가니의 경우 온도가 상승함에 따라 1350 o C에서부터 결정화가 진행되는 것을 알 수 있었으며, 1450 o C가 되어서야 균일하게 결정화가 되는 것을 확인하였으며, 결정상은 β- cristobalite로 확인되었다. Ba이 코팅된 도가니는 1000 o C부터 결정화가 진행되고 1300 o C에서 전체적으로 도가니 표면에 균일하게 결정화가 진행되는 것을 알 수 있었다. Ba이 코팅된 도가니는 결정상으로 α-cristobalite와 침상 결정의 BaSi2O5이 생성되었다가 소멸하며, β-cristobalite 상이 최종적으로 균일한 결정상으로 남는 것을 알 수 있다.
Abstract
In order to avoid un-uniform crystallization on the surface of a quartz glass crucible that is known to affect the production yield of the single crystal silicon, Ba (barium) was selected as a crystallization promotor and the inner surface of the crucible was coated using Ba (barium hydroxide octahydrate)-solution by the spray pyrolysis method. For un-coated crucible, it was found that the crystallization of its surface started at 1350 o C, and at 1450 o C the surface was uniformly crystallized with β-cristobalite phase. It was found that the crucible coated with Ba began to be crystallized from 1000 o C and was uniformly crystallized on the crucible surface at 1300 o C. In this case, α-cristobalite and needle-shaped BaSi2O5 phase were created and disappeared as a crystal phase, and the β-cristobalite phase was eventually evenly distributed over the Ba-coated crucible surface.
참고문헌 (9)
- R.L. Hansen, "Quartz glass crucible and method for treating surface of quartz glass crucible, US patent 9139932B2", ~ (2015)
- T. Sudo, "Vitreous silica crucible and method of manufacturing the same, US patent 20120167821A1", ~ (2012)
- K. Kemmochi, "Silica glass crucible with barium-doped inner wall, US patent 7427327B2", ~ (2008)
- A.V. Hariharan, "Protective layer for quartz crucibles used for silicon crystallization, US Patent, 6479108B2", ~ (2002)
- X. Huang, "Reaction at the interface between Si melt and a Ba-doped silica crucible", J. Cryst. Growth, 277, pp.154~ (2005)[DOI]
- S. Maeda, "Morphology variations on inner surface of silica crucibles depending on oxygen concentration in silicon melts", J. Cryst. Growth, 194, pp.70~ (1998)[DOI]
- X. Huang, "Analysis of the reaction at the interface between Si melt and Ba-doped silica glass", J. Cryst. Growth, 306, pp.422~ (2007)[DOI]
- Y. Yoshiyuki, "Process for surface modifying a quartz glass crucible, European patent 1348782B1", ~ (2010)
- Z. Liu, "Reaction between liquid silicon and vitreous silica", J. Mater. Res., 7, pp.352~ (1992)[DOI]