Quatrz 웨이퍼의 직접접합과 극초단 레이저 가공을 이용한 체내 이식형 혈압센서 개발
Development of Implantable Blood Pressure Sensor Using Quartz Wafer Direct Bonding and Ultrafast Laser Cutting
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In this paper we present an implantable pressure sensor to measure real-time blood pressure by monitoring mechanical movement of artery. Sensor is composed of inductors (L) and capacitors (C) which are formed by microfabrication and direct bonding on two biocompatible substrates (quartz). When electrical potential is applied to the sensor, the inductors and capacitors generates a LC resonance circuit and produce characteristic resonant frequencies. Real-time variation of the resonant frequency is monitored by an external measurement system using inductive coupling. Structural and electrical simulation was performed by Computer Aided Engineering (CAE) programs, ANSYS and HFSS, to optimize geometry of sensor. Ultrafast laser (femto-second) cutting and MEMS process were executed as sensor fabrication methods with consideration of brittleness of the substrate and small radial artery size. After whole fabrication processes, we got sensors of 3 mm × 15 mm × 0.5 mm. Resonant frequency of the sensor was around 90 MHz at atmosphere (760 mmHg), and the sensor has good linearity without any hysteresis. Longterm (5 years) stability of the sensor was verified by thermal acceleration testing with Arrhenius model. Moreover, in-vitro cytotoxicity test was done to show biocompatiblity of the sensor and validation of real-time blood pressure measurement was verified with animal test by implant of the sensor. By integration with development of external interrogation system, the proposed sensor system will be a promising method to measure real-time blood pressure
Abstract
In this paper we present an implantable pressure sensor to measure real-time blood pressure by monitoring mechanical movement of artery. Sensor is composed of inductors (L) and capacitors (C) which are formed by microfabrication and direct bonding on two biocompatible substrates (quartz). When electrical potential is applied to the sensor, the inductors and capacitors generates a LC resonance circuit and produce characteristic resonant frequencies. Real-time variation of the resonant frequency is monitored by an external measurement system using inductive coupling. Structural and electrical simulation was performed by Computer Aided Engineering (CAE) programs, ANSYS and HFSS, to optimize geometry of sensor. Ultrafast laser (femto-second) cutting and MEMS process were executed as sensor fabrication methods with consideration of brittleness of the substrate and small radial artery size. After whole fabrication processes, we got sensors of 3 mm × 15 mm × 0.5 mm. Resonant frequency of the sensor was around 90 MHz at atmosphere (760 mmHg), and the sensor has good linearity without any hysteresis. Longterm (5 years) stability of the sensor was verified by thermal acceleration testing with Arrhenius model. Moreover, in-vitro cytotoxicity test was done to show biocompatiblity of the sensor and validation of real-time blood pressure measurement was verified with animal test by implant of the sensor. By integration with development of external interrogation system, the proposed sensor system will be a promising method to measure real-time blood pressure
참고문헌 (19)
- A study on the effective chronic disease management, "Y. H. Joung", Korea Institute for Health and Social Affairs, ~ (2013)
- Paul A. James, "2014 Evidence-Based Guideline for the Managementof High Blood Pressure in Adults Report From the Panel Members Appointed to the Eighth Joint National Committee (JNC 8)", American Medical Association, 1~14 (2013)
- 한진옥, "신규 고혈압 환자에서 치료지속성이 고혈압 조절에 미치는 영향", 보건행정학회지, 24(2), pp.136~142 (2014), 한국보건행정학회[DOI]
- S. I. Kim, "Development of Implantable Pressure Sensor using MEMS Process and Quartz Wafer Direct Bonding", pp.2015
- 박정배, "2004 Korean Hypertension Treatment Guideline and Its Perspective", Korean Circulation Journal, 36(6), pp.405~410 (2006), 대한심장학회
- J. V. Edmond, "Invasive vs non-invasive measurement of arterial pressure", Br J Anesth, 57, pp.434~444 (1985)
- P. M. Kearney, "Global burden of hypertension : analysis of worldwide data", The Lancet, 365, pp.217~223 (2005)
- K.H. Shin, , Proc. IEEE Sensors 2004, pp.844~ (2004)
- M. A. Fonseca, "Wireless micromachined ceramic pressure sensor for hightemperature applications", IEEE J. MEMS, 11, pp.337~343 (2002)
- S. S. Mohan, "Simple accurate expressions for planar spiral inductances", IEEE J. Solid-State Circuits, 34, pp.1419~1424 (1999)
- T. J. Harpster, "A passive wireless integrated humidity sensor", Sens. Actuators A, Phys, 95, pp.100~107 (2002)
- J. C. Butler, "Wireless, passive, resonant-circuit, inductively coupled, inductive strain sensor", Sens. Actuators A, Phys, 102, pp.61~66 (2002)
- E. Y. Chow, "Fully wireless implantable cardiovascular pressure monitor integrated with a medical stent", IEEE Trans. Biomed. Circuits and Systems, 57, pp.1487~1496 (2010)
- W. B. Kuhn, "Analysis of Current Crowding Effects in Multiturn Spiral Inductors", IEEE Trans on Microwave Theory and Techniques, 49, pp.31~38 (2001)
- Orjan Vallin, "DIRECT BONDED QUARTZ RESONATORS", IEEE International Frequency Control Symposium and PDA Exhibition, pp.345~348 (2001)
- A.D. McNaught, "Compendium of Chemical Terminology", pp.1175~ (1994), Gold Book
- Arrhenius, S.A., "zÜber die Dissociationswärme und den EinflusB der Temperatur auf den Dissociationsgrad der Elektrolyte", pp.96~116 (1889), Wilhelm Engelmann
- "Semiconductor Device Reliability handbook", Renesas Electronics Corporation, 260~ (2013)
- G. Mancia, "Improving the management of hypertension : reconsidering efficacy assessment", MEDICOGRAPHIA, 32, pp.221~329 (2010)