레이저 직접 묘화 시스템의 에어리얼 이미지에 관한 연구
Study on the Aerial Image of an Laser Direct Writing System
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초록
We studied the aerial image of an laser direct writing system. An analytical expression for the pixel image was introduced and a concise formula for the aerial image of the system was presented. Simulations of a sawtooth pattern having various period values were performed. The aerial image contrast was obtained as a function of the sawtooth pattern period. It was found that the shorter the period, the worse the aerial image contrast. For sawtooth pattern periods larger than 84.0 ㎛ (40-pixel), the image contrast was greater than 0.9, while for sawtooth pattern periods smaller than 10.5 ㎛ (5-pixel), the image contrast was lower than 0.5
Abstract
We studied the aerial image of an laser direct writing system. An analytical expression for the pixel image was introduced and a concise formula for the aerial image of the system was presented. Simulations of a sawtooth pattern having various period values were performed. The aerial image contrast was obtained as a function of the sawtooth pattern period. It was found that the shorter the period, the worse the aerial image contrast. For sawtooth pattern periods larger than 84.0 ㎛ (40-pixel), the image contrast was greater than 0.9, while for sawtooth pattern periods smaller than 10.5 ㎛ (5-pixel), the image contrast was lower than 0.5
참고문헌 (14)
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