자동차 부품 응용을 위한 자왜 박막의 기판효과
Substrate Effects of Magnetostrictive Thin Film on Magnetostriction for Automotive Parts Application
0
조회
0
다운로드
3
인용
0
참고문헌
키워드
초록
Magnetostrictive thin films can be applied in transmission system for the enhancement of energy efficiency. In this study, four kinds of substrates (Si, glass, Fe, polyimide) with the magnetostrictive thin film layers are prepared and investigated to characterize the magnetic and mechanical behaviors due to the substrates effects. The fabricated substrates have thicknesses of 50, 150 and 500um with cantilever shape. TbDyFe films are deposited by DC magnetron sputtering with 1～10m thick. The deposited film thicknesses are verified using X-ray diffraction. The magnetization of each sample is examined using VSM(Vibrating Sample Magnetometer) and magnetostriction is also measured using capacitance method to characterize magneto-mechanical behaviors. The magnetostriction results as deflections are compared and the results are discussed for micro actuator applications.
Abstract
Magnetostrictive thin films can be applied in transmission system for the enhancement of energy efficiency. In this study, four kinds of substrates (Si, glass, Fe, polyimide) with the magnetostrictive thin film layers are prepared and investigated to characterize the magnetic and mechanical behaviors due to the substrates effects. The fabricated substrates have thicknesses of 50, 150 and 500um with cantilever shape. TbDyFe films are deposited by DC magnetron sputtering with 1～10m thick. The deposited film thicknesses are verified using X-ray diffraction. The magnetization of each sample is examined using VSM(Vibrating Sample Magnetometer) and magnetostriction is also measured using capacitance method to characterize magneto-mechanical behaviors. The magnetostriction results as deflections are compared and the results are discussed for micro actuator applications.
참고문헌 (9)
- E. Ghassemieh, "Materials in Automotive Application, State of the Art and Prospects", pp.365~394 (2011), New Trends and Developments in Automotive Industry, InTech, Inc.
- Body, C., "Application of Magnetostrictive Thin Films for Microdevices", IEEE Transactions on Magnetics, 33(2), pp.2163~2166 (1997)
- 여문수, "MRF 댐퍼 응용 야지주행차량의 승차감 제어기법에 관한 연구", 한국기계기술학회지, 11(4), pp.73~79 (2009), 한국기계기술학회
- 김광석, "차량의 동력전달장치 모델 개발에 관한 연구", 한국기계기술학회지, 13(3), pp.17~24 (2011), 한국기계기술학회
- H. Janocha, "Application Potential of Magnetic Field Driven New Actuators", Sensors and Actuators A : Physical, 91, pp.126~132 (2001)
- V. Iannotti, "Improved model for the magnetostrictive deflection of a clamped filmsubstrate system", Journal of Magnetism and Magnetic Materials, 202, pp.191~196 (1999)
- H. Janocha, "Adaptronics and Smart Structures : Basics, Materials, Design, and Applications" (1999), Springer- Verlag
- M. R. J. Gibbs, "Magnetic Materials for MEMS Applications", Jounal of Physics D : Applied Physics, 37, pp.237~244 (2004)
- Quandt, E., "Preparation and applications of magnetostrictive thin films", Journal of Applied Physics, 76(10), pp.7000~7002 (1994)