Tb0.24Dy0.76Fe2-xNix 박막 구동기를 이용한 무선 마이크로 광학시스템의 개발
Development of Tb0.24Dy0.76Fe2-xNix Thin Film Actuators for Micromachined Wireless Optical Mirror Systems
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This paper presents new type magnetostrictive optical systems. The suggested wireless optical systems are developed by using two types of magnetostrictive thin film actuators. The first is a seesaw type wireless-controlled compact optical switch, and another is a comb type TbDyFeNi thin film actuator by silicon micromachining techniques with DC magnetron sputtering. In the seesaw type, TbDyFe films are selectively deposited on the micromachined switch matrix. For the optical switching operation, switch is arranged in a 1×2 array (mirror size of 5mm × 800μm × 50μm) and has different length from the supporting point. Mirrors are also actuated by externally applied magnetic fields up to 0.5T. In the comb type, the effect of Ni content on the magneto-mechanical properties of the Tb0.24Dy0.76Fe2 system is investigated with the effect of deposited film thickness of TbDyFeNi on silicon substrate for wireless microactuator. As results, magneto-mechanical characteristics are investigated. using magnetization and deflected angle variation.
Abstract
This paper presents new type magnetostrictive optical systems. The suggested wireless optical systems are developed by using two types of magnetostrictive thin film actuators. The first is a seesaw type wireless-controlled compact optical switch, and another is a comb type TbDyFeNi thin film actuator by silicon micromachining techniques with DC magnetron sputtering. In the seesaw type, TbDyFe films are selectively deposited on the micromachined switch matrix. For the optical switching operation, switch is arranged in a 1×2 array (mirror size of 5mm × 800μm × 50μm) and has different length from the supporting point. Mirrors are also actuated by externally applied magnetic fields up to 0.5T. In the comb type, the effect of Ni content on the magneto-mechanical properties of the Tb0.24Dy0.76Fe2 system is investigated with the effect of deposited film thickness of TbDyFeNi on silicon substrate for wireless microactuator. As results, magneto-mechanical characteristics are investigated. using magnetization and deflected angle variation.
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