그래핀 박막 및 타이타늄 기판을 적용한 고감도 마이크로 압력센서 개발
Development of High Sensitivity Micro Pressure Sensor Using Graphene Diaphragm and Titanium Substrate
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In this research, a capacitance pressure sensor with graphene membrane and titanium substrate have been developed and studied as a potential robust substrate and a sensitive membrane material for micromachined devices. Mechanical lamination process combined with micromachining processes have been selected for the fabrication of the pressure sensor. Prior to the fabrication, capacitive pressure sensors based on a graphene diaphragm and titanium substrate have been designed. The fabricated pressure sensor uses a titanium substrate, a graphene film laminated with a floating movable plate, and a fixed surface micromachined back electrode of electroplated nickel. Finite element method is adopted to investigate the residual stresses formed in the process.Also, the out-of-plane strain is calculated under the pressure of the diaphragm. The sensitivity of devices manufactured using these techniques is 7.5 to 4 kPa-1, and the net capacitance change in the range of 0 to 180 kPa is 013 pF.
Abstract
In this research, a capacitance pressure sensor with graphene membrane and titanium substrate have been developed and studied as a potential robust substrate and a sensitive membrane material for micromachined devices. Mechanical lamination process combined with micromachining processes have been selected for the fabrication of the pressure sensor. Prior to the fabrication, capacitive pressure sensors based on a graphene diaphragm and titanium substrate have been designed. The fabricated pressure sensor uses a titanium substrate, a graphene film laminated with a floating movable plate, and a fixed surface micromachined back electrode of electroplated nickel. Finite element method is adopted to investigate the residual stresses formed in the process.Also, the out-of-plane strain is calculated under the pressure of the diaphragm. The sensitivity of devices manufactured using these techniques is 7.5 to 4 kPa-1, and the net capacitance change in the range of 0 to 180 kPa is 013 pF.
참고문헌 (12)
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