O2 플라즈마 표면 처리 공정 후 라미네이션 공정으로 제작된 흑연 페이스트 기반의 저비용 및 고감도 유연 압력 센서
Low Cost and High Sensitivity Flexible Pressure Sensor Based on Graphite Paste through Lamination after O2 Plasma Surface Treatment Process
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초록
저렴한 전도성 흑연을 인쇄전자 공법으로 유연 압력 센서를 개발하였다. 유연 압력 센서는 의료, 게임, AI 등 미래 산업에 활용될 소재로 각광받고 있다. 유연 압력 센서용 인쇄전극을 다양한 전기-기계적 특성을 평가한 결과 최대인장률 20%, 30°의 인장/굽힘, 간이 맥박 시험에서 일정한 저항 변화율을 보였다. 이렇게 검증이 완료된 전극을 시뮬레이션하여 더 적합한 matrix 패턴을 설계하였다. Serpentine 패턴을 활용하여 matrix 패턴 제작과 인캡슐레이션을 동시에 진행할수 있는 공정을 활용하였다. 인쇄된 흑연 전극의 한쪽 면에 접착력 증가를 위한 O2 플라즈마 표면처리하고, 90°회전시켜, 라미네이션 공정을 통해 2개의 전극을 하나로 제작하였다. 이렇게 제작된 matrix 패턴을 인체의 손목 맥박 위치에 부착하여 실측을 진행한 결과 남녀 상관없이 일정한 저항 변화율을 보였다.
Abstract
Flexible pressure sensor was developed using low-cost conductive graphite as printed electronics. Flexible pressure sensors are attracting attention as materials to be used in future industries such as medical, games, and AI. As a result of evaluating various electromechanical properties of the printed electrode for flexible pressure sensors, it showed a constant resistance change rate in a maximum tensile rate of 20%, 30° tension/bending, and a simple pulse test. A more appropriate matrix pattern was designed by simulating the electrodes for which this verification was completed. Utilizing the Serpentine pattern, we utilized a process that allows simultaneous fabrication and encapsulation of the matrix pattern. One side of the printed graphite electrode was O2 plasma surface treated to increase adhesive strength, rotated 90 times, and two electrodes were made into one through a lamination process. As a result of pasting the matrix pattern prepared in this way to the wrist pulse position of the human body and proceeding with the actual measurement, a constant rate of resistance change was shown regardless of gender.
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