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Atom Probe Tomography를 이용한 나노 스케일의 조성분석: I. 이론과 설비

Nano Scale Compositional Analysis by Atom Probe Tomography: I. Fundamental Principles and Instruments

박찬경|정우영|방찬우|구길호
한국현미경학회 (Korean Society Of Microscopy)|2011.06|Applied Microscopy|제41권 제2호|pp. 81-88

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참고문헌

키워드

Atom probe tomographyField evaporationPulsed laser atom probeEnergy compensatorFocused Ion Beam
주제분류자연과학일반

초록

최근 나노 영역에서의 구조분석과 조성분석의 중요성이 증대되고 있으나, 기존의 분석장비들은 한계에 부딪히고 있다. 최근개발된 APT는 nm 이하의 공간분해능과 수십 ppm수준의 detection limit으로 원소의 3차원분포와 조성정보를 제공해 주는 분석장비로서, 이러한 기존 분석의 한계를 극복할 수 있는 새로운분석장비이다. 그러나 국내에는 아직 잘 알려지지 않아 활용이미비한 실정이다. 따라서, 본 논문에서는 APT에 대한 이해를 돕기 위해 APT분석의 원리와 시편준비에 대해 소개하였다.

Abstract

Even though importance of nano-scale structure and compositional analysis have been getting increased, existing analysis tools have been reached to their limitations. Recent development of Atom Probe Tomography (APT), providing 3-dimensional elemental distribution and compositional information with sub-nm scale special resolution and tens of ppm detection limit, is one of key technique which can overcome these limitations. However, due to the fact that APT is not well known yet in the domestic research area, it has been rarely utilized so far. Therefore, in this article, the theoretical background of APT was briefly introduced with sample preparation to help understanding APT analysis.

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