A Brief Overview of Atom Probe Tomography Research
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Atom probe tomography (APT) has been fast rising in prominence over the past decade as a key tool for nanoscale analytical characterization of a range of materials systems. APT provides three-dimensional mapping of the atom distribution in a small volume of solid material. The technique has evolved, with the incorporation of laser pulsing capabilities, and, combined with progress in specimen preparation, APT is now able to analyse a very range of materials, beyond metals and alloys that used to be its core applications. The present article aims to provide an overview of the technique, providing a brief historical perspective, discussing recent progress leading to the state-of-the-art, some perspectives on its evolution, with targeted examples of applications.
Abstract
Atom probe tomography (APT) has been fast rising in prominence over the past decade as a key tool for nanoscale analytical characterization of a range of materials systems. APT provides three-dimensional mapping of the atom distribution in a small volume of solid material. The technique has evolved, with the incorporation of laser pulsing capabilities, and, combined with progress in specimen preparation, APT is now able to analyse a very range of materials, beyond metals and alloys that used to be its core applications. The present article aims to provide an overview of the technique, providing a brief historical perspective, discussing recent progress leading to the state-of-the-art, some perspectives on its evolution, with targeted examples of applications.
참고문헌 (125)
- Araullo-Peters V J, "A new systematic framework for crystallographic analysis of atom probe data", Ultramicroscopy, 154, pp.7~14 (2015)
- Bas P, "A general protocol for the reconstruction of 3D atom probe data", Appl. Surf. Sci, 87, pp.298~304 (1995)
- Beavan L A, "The defect structure of depleted zones in irradiated tungsten", Acta Metall, 19, pp.1339~1350 (1971)
- Bémont E, "Effects of incidence angles of ions on the mass resolution of an energy compensated 3D atom probe", Ultramicroscopy, 95, pp.231~238 (2003)
- Blavette D, "An atom probe for three-dimensional tomography", Nature, 363, pp.432~435 (1993)
- Blum I, "Dissociation dynamics of molecular ions in high DC electric field", J. Phys. Chem. A, 120, pp.3654~3662 (2016)
- Boll T, "Investigation of the site occupation of atoms in pure and doped TiAl", Ti3Al intermetallic, 2007, pp.107, 796~801
- Breen A J, "Restoring the lattice of Si-based atom probe reconstructions for enhanced information on dopant positioning", Ultramicroscopy, 159, pp.314~323 (2015)
- Breen A J, "Resolving the morphology of niobium carbonitride nano-precipitates in steel using atom probe tomography", Microsc. Microanal, 20, pp.1100~1110 (2014)
- Brenner S S, "FIM-atom probe analysis of thin nitride platelets in Fe-3 at.% Mo", Scripta Metall, 5, pp.865~869 (1971)
- Bunton J, "Instrumentation developments in atom probe tomography:applications in semiconductor research", Microsc. Microanal, 12, pp.1730~1731 (2006)
- Bunton J H, "Advances in pulsedlaser atom probe: instrument and specimen design for optimum performance", Microsc. Microanal, 13, pp.418~427 (2007)
- Cadel E, "Depth resolution function of the laser assisted tomographic atom probe in the investigation of semiconductors", J. Appl. Phys, 106, pp.044908~ (2009)
- Cerezo A, "Aspects of the performance of a femtosecond laser-pulsed 3-dimensional atom probe", Ultramicroscopy, 107, pp.720~725 (2007)
- Cerezo A, "Atom probe tomography today", Mater. Today, 10, pp.36~42 (2007)
- Cerezo A, "Performance of an energy-compensated three-dimensional atom probe", Rev. Sci. Instrum, 69, pp.49~58 (1998)
- Cerezo A, "Application of a positionsensitive detector to atom probe microanalysis", Rev. Sci. Instrum, 59, pp.862~866 (1988)
- Chen Y M, "Laser assisted field evaporation of oxides in atom probe analysis", Ultramicroscopy, 111, pp.562~566 (2011)
- Clifton P H, "Performance advantages of a modern, ultra-high mass resolution atom probe", Microsc. Microanal, 14, pp.454~455 (2008)
- Da Costa G, "Design of a delay-line position-sensitive detector with improved performance", Rev. Sci. Instrum, 76, pp.013304~ (2005)
- Dagan M, "Imaging of radiation damage using complementary field ion microscopy and atom probe tomography", Ultramicroscopy, 159, pp.387~394 (2015)
- De Geuser F, "Materials Science Forum, Vol. 794", pp.926~932 (2014), Trans Tech Publications
- De Geuser F, "3D atom probe study of solute atoms clustering during natural ageing and pre-ageing of an Al-Mg-Si alloy", Philos. Mag. Lett, 86, pp.227~234 (2006)
- Deconihout B, "Toward a laser assisted wide-angle tomographic atom-probe", Surf. Interface Anal, 39, pp.278~282 (2007)
- Dempsey N M, "High-coercivity Nd–Fe–B thick films without heavy rare earth additions", Acta Mater, 61, pp.4920~4927 (2013)
- Faulkner R G, "Field-ion microscopy of the early stages of γ'precipitation in a nickel-aluminium alloy", Acta Metall, 20, pp.703~710 (1972)
- Felfer P J, "A reproducible method for damage-free site-specific preparation of atom probe tips from interfaces", Microsc. Res. Tech, 75, pp.484~491 (2012)
- Forbes R G, "Field evaporation theory: a review of basic ideas", Appl. Surf. Sci, 87, pp.1~11 (1995)
- Gault B, "Influence of the wavelength on the spatial resolution of pulsed-laser atom probe", J. Appl. Phys, 110, pp.094901~ (2011)
- Gault B, "Atom probe microscopy investigation of Mg site occupancy within δ′ precipitates in an Al–Mg–Li alloy", Scripta Mater, 66, pp.903~906 (2012)
- Gault B, "Advances in the reconstruction of atom probe tomography data", Ultramicroscopy, 111, pp.448~457 (2011)
- Gault B, "Impact of laser pulsing on the reconstruction in an atom probe tomography", Ultramicroscopy, 110, pp.1215~1222 (2010)
- Gault B, "Origin of the spatial resolution in atom probe microscopy", Appl. Phys. Lett, 95, pp.034103~ (2009)
- Gault B, "Spatial resolution in atom probe tomography", Microsc. Microanal, 16, pp.99~110 (2010)
- Gault B, "Advances in the calibration of atom probe tomographic reconstruction", J. Appl. Phys, 105, pp.034913~ (2009)
- Gault B, "Influence of surface migration on the spatial resolution of pulsed laser atom probe tomography", J. Appl. Phys, 108, pp.044904~ (2010)
- Gault B, "Behavior of molecules and molecular ions near a field emitterThis work is a partial contribution of the US Government and therefore is not subject to copyright in the United States", New J. Phys, 18, pp.033031~ (2016)
- Gault B, "Atom Probe Characterization of Corroded Alloy 600", Microsc. Microanal, 19, pp.1020~1021 (2013)
- Gault B, "Optical and thermal processes involved in ultrafast laser pulse interaction with a field emitter", Ultramicroscopy, 107, pp.713~719 (2007)
- Gault B, "Estimation of the tip field enhancement on a field emitter under laser illumination", Appl. Phys. Lett, 86, pp.094101~ (2005)
- Gault B, "Design of a femtosecond laser assisted tomographic atom probe", Rev. Sci. Instrum, 77, pp.043705~ (2006)
- Geiser B P, "Spatial distribution maps for atom probe tomography", Microsc. Microanal, 13, pp.437~447 (2007)
- Gilbert M, "Some aspects of the silicon behaviour under femtosecond pulsed laser field evaporation", Ultramicroscopy, 107, pp.767~772 (2007)
- Gordon L M, "Nanoscale chemical tomography of buried organic-inorganic interfaces in the chiton tooth", Nature, 469, pp.194~197 (2011)
- Haley D, "Influence of field evaporation on radial distribution functions in atom probe tomography", Philos. Mag, 89, pp.925~943 (2009)
- Hellman O C, "Analysis of three-dimensional atom-probe data by the proximity histogram", Microsc. Microanal, 6, pp.437~444 (2000)
- Herbig M, "Combining structural and chemical information at the nanometer scale by correlative transmission electron microscopy and atom probe tomography", Ultramicroscopy, 153, pp.32~39 (2015)
- Hono K, "Broadening the applications of the atom probe technique by ultraviolet femtosecond laser", Ultramicroscopy, 111, pp.576~583 (2011)
- Jagutzki O, "Multiple hit readout of a microchannel plate detector with a three-layer delay-line anode", IEEE Trans. Nucl. Sci, 49, pp.2477~2483 (2002)
- Karahka M, "The mystery of missing species in atom probe tomography of composite materials", Appl. Phys. Lett, 107, pp.062105~ (2015)
- Karlsson J, "Atomically resolved tissue integration", Nano Lett, 14, pp.4220~4223 (2014)
- Kellogg G L, "Determining the field emitter temperature during laser irradiation in the pulsed laser atom probe", J. Appl. Phys, 52, pp.5320~5328 (1981)
- Kellogg G L, "Measurement of the charge state distribution of field evaporated ions: evidence for post-ionization", Surf. Sci, 120, pp.319~333 (1982)
- Kellogg G L, "Pulsed-laser atom-probe field-ion microscopy", J. Appl. Phys, 51, pp.1184~1193 (1980)
- Kelly T F, "First data from a commercial local electrode atom probe (LEAP)", Microsc. Microanal, 10, pp.373~383 (2004)
- Kelly T F, "Atom probe tomography of electronic materials", Annu. Rev. Mater. Res, 37, pp.681~727 (2007)
- Kelly T F, "Laser pulsing of field evaporation in atom probe tomography", Curr. Opin. Solid State Mater. Sci, 18, pp.81~89 (2014)
- Kelly T F, "Practical determination of spatial resolution in atom probe tomography", Microsc. Microanal, 15, pp.12~ (2009)
- Kim J H, "The role of grain boundaries in the initial oxidation behavior of austenitic stainless steel containing alloyed Cu at 700oC for advanced thermal power plant applications", Corros. Sci, 96, pp.52~66 (2015)
- Kingham D R, "The post-ionization of field evaporated ions: a theoretical explanation of multiple charge states", Surf. Sci, 116, pp.273~301 (1982)
- Krug M E, "Comparison between dislocation dynamics model predictions and experiments in precipitation-strengthened Al–Li–Sc alloys", Acta Mater, 79, pp.382~395 (2014)
- Kuzmina M, "Linear complexions: confined chemical and structural states at dislocations", Science, 349, pp.1080~1083 (2015)
- La Fontaine A, "Atom probe study of chromium oxide spinels formed during intergranular corrosion", Scripta Mater, 99, pp.1~4 (2015)
- La Fontaine A, "Atomic-scale compositional mapping reveals Mg-rich amorphous calcium phosphate in human dental enamel", Sci. Adv, 2, pp.e1601145~ (2016)
- Larson D J, "Focused ion-beam milling for field-ion specimen preparation:: preliminary investigations", Ultramicroscopy, 75, pp.147~159 (1998)
- Larson D J, "Toward atom probe tomography of microelectronic devices", J. Phys.: Conf. Ser, 326, pp.012030~ (2011)
- Larson D J, "From the store shelf to device-level atom probe analysis: an exercise in feasibility", 37th International Symposium for Testing and Failure Analysis, pp.189~197 (2011), ISTFA
- Larson D J, "Atomprobe tomographic studies of thin films and multilayers", MRS Bull, 34, pp.732~737 (2009)
- Larson D J, "Atom probe tomography spatial reconstruction: status and directions", Curr. Opin. Solid State Mater. Sci, 17, pp.236~247 (2013)
- Mao Z G, "The mechanism of morphogenesis in a phase-separating concentrated multicomponent alloy", Nat. Mater, 6, pp.210~216 (2007)
- Marceau R K W, "Quantitative atom probe analysis of nanostructure containing clusters and precipitates with multiple length scales", Ultramicroscopy, 111, pp.738~742 (2011)
- Marceau R K W, "Multi-scale correlative microscopy investigation of both structure and chemistry of deformation twin bundles in Fe–Mn–C steel", Microsc. Microanal, 19, pp.1581~1585 (2013)
- Marquis E A, "Microstructural evolution and strengthening mechanisms in Al-Sc and Al-Mg-Sc alloys", Ph.D, pp.2002
- Marquis E A, "On the current role of atom probe tomography in materials characterization and materials science", Curr. Opin. Solid State Mater. Sci, 17, pp.217~223 (2013)
- Marquis E A, "Applications of atom-probe tomography to the characterisation of solute behaviours", Mater. Sci. Eng. R Reports, 69, pp.37~62 (2010)
- Marquis E A, "Nuclear reactor materials at the atomic scale", Mater. Today, 12, pp.30~37 (2009)
- Marquis E A, "Structural materials: understanding atomic-scale microstructures", MRS Bull, 34, pp.725~731 (2009)
- Mazumder B, "Evaporation mechanisms of MgO in laser assisted atom probe tomography", Ultramicroscopy, 111, pp.571~575 (2011)
- Meisnar M, "Atom probe tomography of stress corrosion crack tips in SUS316 stainless steels", Corros. Sci, 98, pp.661~671 (2015)
- Melmed A J, "Feasibility of ToF atom-probe analysis of silicon", Surf. Sci, 103, pp.L139~L142 (1981)
- Melmed A J, "The art and science and other aspects of making sharp tips", J. Vac. Sci, 9, pp.601~608 (1991)
- Miller M K, "The development of atom probe field-ion microscopy", Mater. Charact, 44, pp.11~27 (2000)
- Miller M K, "Atom probe specimen preparation with a dual beam FIB Miller", 2006 19th International Vacuum Nanoelectronics Conference, pp.147~148 (2006), IEEE
- Moody M P, "Atomically resolved tomography to directly inform simulations for structure–property relationships", Nat. Commun, 5 (2014)
- Moody M P, "Qualification of the tomographic reconstruction in atom probe by advanced spatial distribution map techniques", Ultramicroscopy, 109, pp.815~824 (2009)
- Moody M P, "Lattice rectification in atom probe tomography: toward true three-dimensional atomic microscopy", Microsc. Microanal, 17, pp.226~239 (2011)
- Moody M P, "Quantitative binomial distribution analyses of nanoscale like-solute atom clustering and segregation in atom probe tomography data", Microsc. Res. Tech, 71, pp.542~550 (2008)
- Moody M P, "Contingency table techniques for three dimensional atom probe tomography", Microsc. Res. Tech, 70, pp.258~268 (2007)
- Müller E W, "Resolution of the atomic structure of a metal surface by the field ion microscope", J. Appl. Phys, 27, pp.474~476 (1956)
- Müller E W, "Field ionization of gases at a metal surface and the resolution of the field ion microscope", Phys. Rev, 102, pp.624~ (1956)
- Müller E W, "The atom-probe field ion microscope", Rev. Sci. Instrum, 39, pp.83~86 (1968)
- Müller M, "Accuracy of pulsed laser atom probe tomography for compound semiconductor analysis", J. Phys.: Conf. Ser, 326, pp.012031~ (2011)
- Müller M, "Some aspects of the field evaporation behaviour of GaSb", Ultramicroscopy, 111, pp.487~492 (2011)
- Nakamura S, "Atom-probe fim studies of β-SiC whiskers", Surf. Sci, 70, pp.452~458 (1978)
- Nishikawa O, "Development of the scanning atom probe and atomic level analysis", Mater. Charact, 44, pp.29~57 (2000)
- Panayi P, "A reflectron for use in a three-dimensional atom probe", Gt. Britain Pat. # GB2426120A, ~ (2006)
- Peterman E M, "Nanogeochronology of discordant zircon measured by atom probe microscopy of Pbenriched dislocation loops", Sci. Adv, 2, pp.e1601318~ (2016)
- Rigutti L, "Coupling atom probe tomography and photoluminescence spectroscopy:exploratory results and perspectives", Ultramicroscopy, 132, pp.75~80 (2013)
- Rolland N, "An analytical model accounting for tip shape evolution during atom probe analysis of heterogeneous materials", Ultramicroscopy, 159, pp.195~201 (2015)
- Schreiber D K, "Examinations of oxidation and sulfidation of grain boundaries in alloy 600 exposed to simulated pressurized water reactor primary water", Microsc. Microanal, 19, pp.676~687 (2013)
- Sebastian J T, "New method for the calibration of three-dimensional atom-probe mass spectra", Rev. Sci. Instrum, 72, pp.2984~2988 (2001)
- Seidman D N, "Three-dimensional atom-probe tomography:advances and applications", Annu. Rev. Mater. Res, 37, pp.127~158 (2007)
- Sha G, "Segregation of solute elements at grain boundaries in an ultrafine grained Al–Zn–Mg–Cu alloy", Ultramicroscopy, 111, pp.500~505 (2011)
- Shariq A, "Exploring the next neighbourhood relationship in metallic glasses utilizing the atom probe tomography", 2006 19th International Vacuum Nanoelectronics Conference, pp.19~20 (2006), IEEE
- Silaeva E P, "Do dielectric nanostructures turn metallic in highelectric dc fields?", Nano Lett, 14, pp.6066~6072 (2014)
- Silaeva E P, "Atom probe tomography and field evaporation of insulators and semiconductors: theoretical issues", Curr. Opin. Solid State Mater. Sci, 17, pp.211~216 (2013)
- Stephenson L T, "Nearest neighbour diagnostic statistics on the accuracy of APT solute cluster characterisation", Philos. Mag, 93, pp.975~989 (2013)
- Stephenson L T, "New techniques for the analysis of fine-scaled clustering phenomena within atom probe tomography (APT) data", Microsc. Microanal, 13, pp.448~463 (2007)
- Stoian R, "Coulomb explosion in ultrashort pulsed laser ablation of Al2O3", Phys. Rev. B, 62, pp.13167~ (2000)
- Suram S K, "Calibration of reconstruction parameters in atom probe tomography using a single crystallographic orientation", Ultramicroscopy, 132, pp.136~142 (2013)
- Thompson K, "In situ site-specific specimen preparation for atom probe tomography", Ultramicroscopy, 107, pp.131~139 (2007)
- Tsong T T, "Energy distributions of pulsed-laser fielddesorbed gaseous ions and field-evaporated metal ions: a direct time-of-flight measurement", Phys. Rev. B, 29, pp.529~ (1984)
- Tsong T T, "Pulsed-laser time-of-flight atom-probe field ion microscope", Rev. Sci. Instrum, 53, pp.1442~1448 (1982)
- Uman E, "The effect of bean origin and temperature on grinding roasted coffee", Sci. Rep, 6, pp.24483~ (2016)
- Valley J W, "Hadean age for a post-magma-ocean zircon confirmed by atom-probe tomography", Nat. Geosci, 7, pp.219~223 (2014)
- Vella A, "Femtosecond field ion emission by surface optical rectification", Phys. Rev. Lett, 99, pp.046103~ (2007)
- Vella A, "Evidence of field evaporation assisted by nonlinear optical rectification induced by ultrafast laser", Phys. Rev. B, 73, pp.165416~ (2006)
- Vurpillot F, "Structural analyses in three-dimensional atom probe: a Fourier transform approach", J. Microsc, 203, pp.295~302 (2001)
- Vurpillot F, "Application of Fourier transform and autocorrelation to cluster identification in the three-dimensional atom probe", J. Microsc, 216, pp.234~240 (2004)
- Vurpillot F, "Reconstructing atom probe data: a review", Ultramicroscopy, 132, pp.19~30 (2013)
- Vurpillot F, "Thermal response of a field emitter subjected to ultra-fast laser illumination", J. Phys. D-Applied Phys, 42, pp.125502~ (2009)
- Walls J M, "The preparation of field electron", field-ion emitters by ion etching, 1974, pp.24, 475~479
- Waugh A R, "In situ ion milling of field ion specimens using a liquid metal ion source", J. Phys. Colloq, 45, pp.C9-207~C9-209 (1984)
- Wilde J, "Three-dimensional atomicscale mapping of a cottrell atmosphere around a dislocation in iron", Scripta Mater, 43, pp.39~48 (2000)
- Yao L, "Crystallographic structural analysis in atom probe microscopy via 3D Hough transformation", Ultramicroscopy, 111, pp.458~463 (2011)
