3차원적 구조분석을 위한 TEM Rotation Holder의신뢰도 점검
Reliability Test of the TEM Rotation Holder for 3-D Structure Analysis
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초록
투과전자현미경을 이용한 3차원적 구조분석의 신뢰도를 향상시키기 위해서는 고니오미터와 사용되는 시료 홀더에 대한 정확도와 정밀도의 측정 및 보정이 필요하다.본 연구에서는 상업용 투과전자현미경 홀더 중의 하나인rotation holder에 대한 작동원리를 기술하고 회전각의 정
Abstract
Accuracy and precision of the goniometer and the specimen holder should be measured and corrected toimprove reliability of 3-D structure analysis using transmission electron microscopy (TEM). In this study, wedescribed the operation principle and performance of the Gatan rotation holder. Through analysis of the imagestaken inside the microscope, rotation angles were measured within the accuracy of ± 0.42. For comparisonthe rotation angles were measured outside the microscope using a home-made measurement tool, whichresulted in the accuracy of ± 0.6. Additionally, we found abnormal specimen drifts during rotation probablydue to the unstable engagement between the specimen cup and the rotation belt.
