TEM sample preparation using micro-manipulator for in-situ MEMS experiment
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Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.
Abstract
Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.
참고문헌 (13)
- J. Damiano, "A MEMS-based technology platform for in-situ TEM heating studies", Microsc. Microanal., 14(S2), pp.1332~ (2008)
- L. A. Giannuzzi, "Theory and new applications of ex situ lift out", Microsc. Microanal, 21(4), pp.1034~ (2015)
- W. Li, "An in-situ TEM microreactor for real-time nanomorphology & physicochemical parameters interrelated characterization", Nano Today, 35, pp.100932~ (2020)
- J. Mayer, "TEM sample preparation andFIBinduced damage", MRS Bull, 32(5), pp.400~407 (2007)
- L. Mele, "A MEMS-based heating holder for the direct imaging of simultaneous in-situ heating and biasing experiments in scanning", transmission electron microscopes, 2016, pp.79(4), 239~250
- L. Novák, "MEMS-based heating element for insituDynamical experiments on FIB", SEM systems, 2016, pp.22(S3), 184~185
- B. Prenitzer, "The correlation between ion beam", material interactions and practical FIB specimen preparation, 2003, pp.9(3), 216~
- M. H. Roshan, "A MEMS-assisted temperature sensor with 20-μK resolution, conversion rate of 200 S", s, and FOM of 0.04 pJK2, 2016, pp.52(1), 185~197
- E. Tochigi, "In situ STEM mechanical experiments at atomic-resolution using a MEMS device", Microsc. Microanal., 25(S2), pp.1884~1885 (2019)
- K. A. Unocic, "Effect of gallium focused ion beam milling on preparation of aluminium thin foils", J. Microsc, 240(3), pp.227~238 (2010)
- J. T. van Omme, "Advanced microheater for in situ transmission electron microscopy; enabling unexplored analytical studies and extreme spatial stability", Ultramicroscopy, 192, pp.14~20 (2018)
- situ investigation of thermally activated processes using MEMS-based devices: practical challenges & applications, "S. Vijayan", ~ (2018)
- S. Vijayan, "Focused ion beam preparation of specimens for micro-electro-mechanical system-based transmission electron microscopy heating experiments", Microsc. Microanal, 23(4), pp.708~ (2017)