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Transmission Electron Microscopy Specimen Preparation of Delicate Materials Using Tripod Polisher

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초록

Transmission electron microscopy (TEM) is a powerful tool for analyzing a broad range of materials and provides localized information about the microstructure. However, the analysis results are strongly influenced by the quality of the thin foil specimen. Sample preparation for TEM analysis requires considerable skill, especially when the area of interest is small or the material of interest is diffi cult to thin because of its high hardness and its mechanical instability when thinned. This article selectively reviews recent advances in TEM sample preparation techniques using a tripod polisher. In particular, it introduces two typical types (flat type and wedge type) of TEM sample preparation and the benefits and drawbacks of each method; finally, a method of making better samples for TEM analysis is suggested.

Abstract

Transmission electron microscopy (TEM) is a powerful tool for analyzing a broad range of materials and provides localized information about the microstructure. However, the analysis results are strongly influenced by the quality of the thin foil specimen. Sample preparation for TEM analysis requires considerable skill, especially when the area of interest is small or the material of interest is diffi cult to thin because of its high hardness and its mechanical instability when thinned. This article selectively reviews recent advances in TEM sample preparation techniques using a tripod polisher. In particular, it introduces two typical types (flat type and wedge type) of TEM sample preparation and the benefits and drawbacks of each method; finally, a method of making better samples for TEM analysis is suggested.

참고문헌 (10)

  1. Ayache J, "Sample Preparation Handbook for Transmission Electron Microscopy: Techniques" (2010), Springer
  2. Barna A, "Sample preparation techniques for TEM Handbook for Microscopy Vol 3 Applications", pp.751~801 (1997), Wiley-VCH Verlag GmbH
  3. Chen J, "Preparation of metallized GaN", sapphire cross sections for TEM analysis using wedge polishing, 2002, pp.33, 489~492
  4. Goodhew P J, "Thin Foil Preparation for Transmission Electron Microscopy" (1985), Elsevier
  5. Hirsch P B, "Electron Microscopy of Thin Crystals" (1965), Butterworths
  6. Kato N I, "Reducing focused ion beam damage to transmission electron microscopy samples", J. Electron Microsc, 53, pp.451~458 (2004)
  7. Klepeis S J, "Specimen Preparation for Transmission Electron Microscopy Vol 3", pp.179~184 (1987), Materials Research Society
  8. Srot V, "Infl uence of TEM specimen preparation on chemical composition of Pb(Mg 1", 3Nb 2, Micron, pp.2014, 62[DOI]
  9. Voyles P, "Imaging of individual atoms inside crystals with ADF-STEM", Ultramicroscopy, 96, pp.251~273 (2003)
  10. Williams D B, "Transmission Electron Microscopy: A Text Book for Materials Science" (2009), Springer

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