KBSI-HVEM 대물렌즈의 구면수차 계수 측정
Measurement of the spherical aberration coefficient of the objective lens in KBSI-HVEM
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초록
Diffractogram 법을 이용하여 한국기초과학지원연구원에 설치된 초고전압 투과전자현미경(KBSI-HVEM)의 대물렌즈에 대한 구면수차 계수와 분해능을 측정하였다. 측정 정밀도 향상을 위해 획득한 diffractoram을 디지털 처리하였고 각 intensity 분포 그래프를 graphical curve fitting으로 정밀하게 분리하였다. 정밀 측정을 위한 실험적 고려 사항들을 고찰하였고 최적 실험 조건 도출을 위한 방안들을 본 실험을 통해 제안하였다. 실험적으로 측정된 대물렌즈의 구면수차 계수는 2.628 ± 0.04 mm 였으며 이 값은 제조사에서 대물렌즈 설계 시 제안한 Cs = 2.65 mm와 거의 일치하는 값이었다.
Abstract
Coefficient of spherical aberration of the objective lens in the KBSI-HVEM was evaluated by diffractogram method. Instrumental resolution was also discussed with this method. In order to improve the accuracy, digital processing and graphical curve fitting for intensity profile of diffractogram were employed. Experimental concerns where the optimal procedure of the measurement can be accomplished for this study were discussed. The spherical aberration coefficient (Cs) was estimated to be 2.628 ± 0.04 mm from this study, which was almost coincident with the value of the manufacture's suggestion (Cs = 2.65 mm).
참고문헌 (11)
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