넓은 다이내믹 레인지의 유연 촉각센서 적용을 위한 PVP 유전층과 PDMS 접착력 검증
Verification of Bonding Force between PVP Dielectric Layer and PDMS for Application of Flexible Capacitive-type Touch Sensor with Large Dynamic Range
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In this paper, we fabricate arrayed-type flexible capacitive touch sensor using liquid metal (LM) droplets (4 mm spatial resolution). Poly-4-vinylphenol (PVP) layer is used as a dielectric layer on the electrode patterned Polyethylene naphthalate (PEN) film. Bonding tests between hydroxyl group (-OH) on the PVP film and polydimethylsiloxane (PDMS) are conducted in a various O2 plasma treatment conditions. Through the tests, we can confirm that non-O2 plasma treated PVP layer and O2 plasma treated PDMS can make a chemical bond. To measure dynamic range of the device, one-cell experiments are conducted and we confirmed that the fabricated device has a large dynamic range (~60 pF).
Abstract
In this paper, we fabricate arrayed-type flexible capacitive touch sensor using liquid metal (LM) droplets (4 mm spatial resolution). Poly-4-vinylphenol (PVP) layer is used as a dielectric layer on the electrode patterned Polyethylene naphthalate (PEN) film. Bonding tests between hydroxyl group (-OH) on the PVP film and polydimethylsiloxane (PDMS) are conducted in a various O2 plasma treatment conditions. Through the tests, we can confirm that non-O2 plasma treated PVP layer and O2 plasma treated PDMS can make a chemical bond. To measure dynamic range of the device, one-cell experiments are conducted and we confirmed that the fabricated device has a large dynamic range (~60 pF).
참고문헌 (14)
- E.G. Bakhoum, "Capacitive pressure sensor with very large dynamic range", IEEE T. COMP. PACK. MAN, 33(1), pp.79~83 (2010)
- H.K. Lee, "Real-time measurement of the three-axis contact force distribution using a flexible capacitive polymer tactile sensor", J. Micromech. Microeng, 21(3), pp.035010~ (2011)
- M.Y. Cheng, "A polymer-based capacitive sensing array for normal and shear force measurement", Sensors, 10, pp.10211~10225 (2010)
- J.A. Dobrzynska, "Polymer-based flexible capacitive sensor for three-axial force measurements", J. Micromech. Mciroeng, 23(1), pp.015009~ (2012)
- H.K. Lee, "Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors", J. Microelectromech. S, 17(4), pp.934~942 (2008)
- L. Viry, "Flexible three-axial force sensor for soft and highly sensitive artificial touch", Adv. Mater, 26(17), pp.2659~2664 (2014)
- R.D. Ponce Wong, "Flexible microfluidic normal force sensor skin for tactile feedback", Sensor. Actuat. A-Phys, 179, pp.62~69 (2012)
- M.Y. Cheng, "Tactile and shear stress sensing array using capacitive mechanisms with floating electrodes", IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp.228~231 (2010)
- M.Y. Cheng, "A flexible capacitive tactile sensing array with floating electrodes", J. Mciromech. Microeng, 19, pp.115001~ (2009)
- D.J. Won, "Arrayed-type touch sensor using micro liquid metal droplets with large dynamic range and high sensitivity", Sensor. Actuat. A-Phys, 235(1), pp.151~157 (2015)
- K. Fukuda, "Fully solution-processed flexible organic thin film transistor arrays with high mobility and exceptional uniformity", Sci. Rep-UK, 4(3947) (2014)
- A. Folch, "Microfabricated elastomeric stencils for micropatterning cell cultures", J. Biomed. Mater. Res, 52, pp.346~353 (2000)
- 백인재, "유기박막 트랜지스터용 PVP (poly-4-vinylphenol) 게이트 절연막의 제작과 특성", 마이크로전자 및 패키징학회지, 12(4), pp.359~363 (2005), 한국마이크로전자및패키징학회
- Y. Sun, "Structural forms of single crystal semiconductor nanoribbons for high performance stretchable electronics", J. Mater. Chem, 17, pp.832~840 (2007)