Fabrication and Characterization of a Sliding-Type Capacitive Strain Sensor for Quantitative Strain Detection
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In this study, a sliding-type capacitive strain sensor was fabricated and characterized for quantitative strain detection. The proposed sensor detects deformation through changes in the overlapping area between two electrodes while maintaining aconstant electrode spacing, resulting in a simplified fabrication process and improved reproducibility compared with conventionalcapacitive structures. The sensor was fabricated using a micro-fabrication process and encapsulated in silicone rubber to providemechanical flexibility and elastic recovery, allowing it to return to its initial state after load release. Capacitance variations werequantitatively measured using an LCR meter under applied tensile strain. The sensor exhibited consistent and repeatable responsesduring repeated loading and unloading cycles, demonstrating stable and reliable performance. These results confirm the feasibilityof the proposed structure for accurate and quantitative strain detection, suggesting its potential applicability in flexible electronicdevices and biomedical sensing platforms.
Abstract
In this study, a sliding-type capacitive strain sensor was fabricated and characterized for quantitative strain detection. The proposed sensor detects deformation through changes in the overlapping area between two electrodes while maintaining aconstant electrode spacing, resulting in a simplified fabrication process and improved reproducibility compared with conventionalcapacitive structures. The sensor was fabricated using a micro-fabrication process and encapsulated in silicone rubber to providemechanical flexibility and elastic recovery, allowing it to return to its initial state after load release. Capacitance variations werequantitatively measured using an LCR meter under applied tensile strain. The sensor exhibited consistent and repeatable responsesduring repeated loading and unloading cycles, demonstrating stable and reliable performance. These results confirm the feasibilityof the proposed structure for accurate and quantitative strain detection, suggesting its potential applicability in flexible electronicdevices and biomedical sensing platforms.