유리렌즈 성형용 금형의 ta-C 보호 필름 제조에 관한 연구

Abstract

Recently aspheric lenses are widely used for superpricision optical instruments, such as cellular phone camera modules, digital cameras and optical communication modules. The aspherical lenses are processed using mold core under high temperature compressive forming pressure. It is imperative to develop superhard protective films for the life extension of lens forming mold core. Especially ta-C films with higher sp3 fractions receive attentions for the life extension of lens forming mold and, in turn, the cost reduction of lenses due to their suprior high temperature stability, high hardness and smooth surfaces. In this study ta-C films were processed on WC mold as a function of substrate bias voltage using FVA (Filtered Vacuum Arc) method. The processed films were characterized by Raman spectroscopy and nano-indentation to investigate bonding nature and hardness,respectively. The film with maximun 87% of sp3 fraction was obtained at the substrate bias voltage of −60 V, which was closest to ta-C film. ta-C films showed better high temperature stability by sustaining relatively high fraction of sp3 bonding even after 2,000 glass lens forming applications.