Preparation of (Pb0.52Zr0.48)TiO3 Thin Films On PbTiO3 Seed Layer
2
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
(Pb0.52Zr0.48)TiO3 (PZT) thin films were prepared on PbTiO3 (PT) seed layers by chemical solution deposition. PT layer with50 nm was used as seed layer to transfer 100 texture to PZT thin films by heterogeneous nucleation during heat treatment. Highly 100 textured PZT thin films were obtained after heat treatments at 700 oC confirmed by X-ray diffraction data. Theprepared PZT thin films show the thickness of 350 nm with 50 nm PT seed layer. Based on the EDX line profile of PZT, Zr/Ti ratio was slightly different inside PZT films, which suggests that interdiffusion of Ti and Zr occurs across the films duringheat treatments. Also, nanobeam diffraction patterns reveals that PZT and PT seed layer are tetragonal perovskite phaseswithout any secondary phases.
Abstract
(Pb0.52Zr0.48)TiO3 (PZT) thin films were prepared on PbTiO3 (PT) seed layers by chemical solution deposition. PT layer with50 nm was used as seed layer to transfer 100 texture to PZT thin films by heterogeneous nucleation during heat treatment. Highly 100 textured PZT thin films were obtained after heat treatments at 700 oC confirmed by X-ray diffraction data. Theprepared PZT thin films show the thickness of 350 nm with 50 nm PT seed layer. Based on the EDX line profile of PZT, Zr/Ti ratio was slightly different inside PZT films, which suggests that interdiffusion of Ti and Zr occurs across the films duringheat treatments. Also, nanobeam diffraction patterns reveals that PZT and PT seed layer are tetragonal perovskite phaseswithout any secondary phases.
참고문헌 (20)
- J.R. Bronson, "PZT MEMS actuated flapping wings for insect-inspired robotics", IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp.1047~1050 (2009), MEMS
- Y. Takahashi, "Piezoelectric ink jet printer head", U.S. Patent No. 5 266 964, ~ (1993)
- N. Ledermann, , Sens. Actuators A Phys, 105, pp.162~170 (2003)
- G.L. Brennecka, , J. Am. Ceram. Soc, 93, pp.3935~3954 (2010)
- B.A. Tuttle, , Eight IEEE international symposium on applications of ferroelectrics (1992)
- R.W. Whatmore, , Phys. Scripta, pp.T129~ (2007)
- G.L. Smith, , J. Am. Ceram. Soc, 95(6), pp.1777~1792 (2012)
- P. Muralt, , Sensor. Actuat. A, 48, pp.157~165 (1995)
- S. Hiboux, , Proc. MRS, 596, pp.499~ (1999)
- G.L. Smith, , J. Am. Ceram. Soc, 95(6), pp.1777~1792 (2012)
- Y. Lin, , Appl. Phys. Lett, 73, pp.2781~ (1998)
- S. Mhin, , J. Am. Ceram. Soc, 98(5), pp.1407~1412 (2015)
- S. Mhin, , 96(9), pp.2706~2709 (2013)
- P. Muralt, , J. Appl. Phys, 83, pp.3835~ (1998)
- K.D. Budd, , Br. Ceram. Proc, 36, pp.107~121 (1985)
- R.H. Kim, , Appl. Phys. Lett, 90, pp.172907~ (2007)
- J. Zhong, , J. Vac. Sci. & Tech. A, 33(5), pp.05E119~ (2015)
- S.Y. Chen, , J. Am. Ceram. Soc, 81, pp.97~105 (1998)
- A.P. Wilkinson, , Chem. Mater, 6, pp.750~754 (1994)
- A. Bose, "PZT Thin Film Growth and Chemical Composition Control on Flat and Novel Three-Dimensional Micromachined Structures for MEMS Devices", Ph. D, pp.2011