Microstructural evolution of chemically vapor-deposited tantalum carbide at elevated temperatu
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Tantalum carbide (TaC), one of the ultra-high temperature ceramics, was chemically vapor-deposited at 1100 - 1300 oC in a TaCl5-C3H6-H2 system. Microstructural evolution of TaC was evaluated after heat treatment at 1850 oC for 4 hours. Various tantalum carbides with different orientation and microstructure were obtained depending on the deposition temperature andthe position. Crystallophic preferred orientation of the TaC changed from highly oriented (111) and (200), to random texture, as deposition temperatures increase. The continuous feed of TaCl4 powders using screw-driven feeder led to the fluctuation of TaCl4 partial pressure during the deposition process, resulted in a low crystallinity and formation of micropores. A dense TaC was only obtained at the high partial pressure of TaCl5. Heat treatment dramatically enhanced crystallinity but micropores were coalesced into large pores along grain boundaries. The influence of crystallophic orientation and microstructure on microstructural evolution and hardness during heat treatment were investigated.
Abstract
Tantalum carbide (TaC), one of the ultra-high temperature ceramics, was chemically vapor-deposited at 1100 - 1300 oC in a TaCl5-C3H6-H2 system. Microstructural evolution of TaC was evaluated after heat treatment at 1850 oC for 4 hours. Various tantalum carbides with different orientation and microstructure were obtained depending on the deposition temperature andthe position. Crystallophic preferred orientation of the TaC changed from highly oriented (111) and (200), to random texture, as deposition temperatures increase. The continuous feed of TaCl4 powders using screw-driven feeder led to the fluctuation of TaCl4 partial pressure during the deposition process, resulted in a low crystallinity and formation of micropores. A dense TaC was only obtained at the high partial pressure of TaCl5. Heat treatment dramatically enhanced crystallinity but micropores were coalesced into large pores along grain boundaries. The influence of crystallophic orientation and microstructure on microstructural evolution and hardness during heat treatment were investigated.
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