Thermodynamic analysis on the chemical vapor deposition process of Ta-C-H-Cl system
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초록
Carbon/carbon composites (C/C) have been widely studied in the aerospace field because of their excellent thermal shockresistance and specific strength at high temperature. However, they have the problems that is easily oxidized and deterioratedunder atmospheric environment. In order to overcome these shortcomings, the CVD coating of ultra-high-temperatureceramics to C/C has become an important technical issue. In this study, thermodynamic calculations were performed to TaCCVD coating on C/C by FactSage 6.2 program. The Ta-C phase diagrams were constructed with the results of thermodynamiccalculations in the Ta-C-H-Cl system. Based on the Ta-C phase diagram, the experimental conditions were designed to confirmthe deposition of various phases such as TaC single phase, TaC + C and TaC + Ta2C by varying the composition of Ta/C ratio. The deposited films were found to be in good agreement with the predicted phases.
Abstract
Carbon/carbon composites (C/C) have been widely studied in the aerospace field because of their excellent thermal shockresistance and specific strength at high temperature. However, they have the problems that is easily oxidized and deterioratedunder atmospheric environment. In order to overcome these shortcomings, the CVD coating of ultra-high-temperatureceramics to C/C has become an important technical issue. In this study, thermodynamic calculations were performed to TaCCVD coating on C/C by FactSage 6.2 program. The Ta-C phase diagrams were constructed with the results of thermodynamiccalculations in the Ta-C-H-Cl system. Based on the Ta-C phase diagram, the experimental conditions were designed to confirmthe deposition of various phases such as TaC single phase, TaC + C and TaC + Ta2C by varying the composition of Ta/C ratio. The deposited films were found to be in good agreement with the predicted phases.
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