다중벽 탄소 나노튜브를 이용한 유동 압력 검출
Pressure sensing of air flow using multi-walled carbon nanotubes
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Abstract
We describe the fabrication and characterization of a doubly clamped multi-walled carbon nanotube (MWNT). Thedevice was asembled by an application of electric field in solution. The MWNT was clamped on end of metal trenchelectrodes in solution and deposited with additional platinum (Pt) on edge of electrode for firmly suspending the MWNTm, respectively.Electrical characteristics of fabricated devices were measured by I-V curve and impedance analysis. The mechanicaldeformation was observed by resistivity in high air presure. Resonant frequency around 6.8 MHz was detected andresistivity was linearly varied according to the magnitude of air presure. This device could have potential applicationsin nanoelectronics and various sensors.
참고문헌 (14)
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