저주파수용 ZnO 압전 마이크로 전원의 설계와 분석
Design and analysis of ZnO piezoelectric micro power generators with low frequency
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초록
This paper describes the characteristics of piezoelectric micro power generators by the ANSYS FEA(finite element analysis). The micro power generator was designed to convert ambient vibration energy to electrical power as a ZnO piezoelectric material. To find optimal model in low vibration ambient, the shape of power generator was changed with different membrane width, thickness, length, and proof mass size. Using the ANSYS modal analysis, bending mode and stress distribution of optimal model were analyzed. Moreover, the displacement with the frequency range was analyzed by harmonic analysis. From the simulation results, the resonance frequency of optimal model is about 373 Hz and investigate the possibility of ZnO micro power generator for ambient vibration applications.
Abstract
This paper describes the characteristics of piezoelectric micro power generators by the ANSYS FEA(finite element analysis). The micro power generator was designed to convert ambient vibration energy to electrical power as a ZnO piezoelectric material. To find optimal model in low vibration ambient, the shape of power generator was changed with different membrane width, thickness, length, and proof mass size. Using the ANSYS modal analysis, bending mode and stress distribution of optimal model were analyzed. Moreover, the displacement with the frequency range was analyzed by harmonic analysis. From the simulation results, the resonance frequency of optimal model is about 373 Hz and investigate the possibility of ZnO micro power generator for ambient vibration applications.
참고문헌 (9)
- H. B. Fang, "Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting", Microelectron. J., 37, pp.1280~1284 (2006)
- Y. B. Jeon, "MEMS power generator with transverse mode thin film PZT", Sens. & Actu. A, 122, pp.16~22 (2005)
- J. Q. Liu, "A MEMSbased piezoelectric power generator array for vibration energy harvesting", Micro- electron. J., 39, pp.802~806 (2008)
- M. Marzencki, "Integrated power harvesting system including a MEMS generator and a power management circuit", Sens. & Actu. A, 145, pp.363~370 (2008)
- S. T. Mckinstry, "Thin film piezoelectrics for MEMS", J. Electroceram., 12, pp.7~17 (2004)
- G. H. Kim, "Deposition of ZnO films grown by pulsed laser deposition for film bulk acoustic resonators", Superlattic. & Microstruc., 39, pp.50~59 (2006)
- S. Wu, "Bulk acoustic wave analysis of crystalline plane oriented ZnO films", J. Appl. Phys., 102, pp.84908(1)~84908(7) (2007)
- D. Shen, "The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting", J. Micromech. Microeng., 18, pp.55017(1)~55017(7) (2008)
- M. R. Guarracino, "A parallel block Lanczos algorithm and its implementation for the evaluation of some eigenvalues of large sparse symmetric matrices on multicomputers", Int. J. Appl. Math. Comput. Sci., 16, pp.241~249 (2006)