CMOS 공정에 적합한 AlN 압전 마이크로 발전기의 제작 및 특성
Fabrication of AlN piezoelectric micro power generator suitable withCMOS process and its characteristics
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This paper describes the fabrication and characteristics of AlN piezoelectric MPG(micro power generator). The micro energy harvester was fabricated to convert ambient vibration energy to electrical power as a AlN piezoelectric cantilever with Si proof-mass. To be compatible with CMOS process, AlN thin film was grown at low temperature by RF magnetron sputtering and micro power generators were fabricated by MEMS technologies. X-ray diffraction pattern proved that the grown AlN film had highly(002) orientation with low value of FWHM(full width at the half maximum, θ = 0.276o) in the rocking curve around(002) reflections. The implemented harvester showed the 198.5 μm highest membrane displacement and generated 6.4 nW of electrical power to 80 kΩ resistive load with 22.6 mVrms voltage from 1.0 G acceleration at its resonant frequency of 389 Hz. From these results, the AlN piezoelectric MPG will be possible to suitable with the batch process and confirm the possibility for power supply in portable, mobile and wearable microsystems.
Abstract
This paper describes the fabrication and characteristics of AlN piezoelectric MPG(micro power generator). The micro energy harvester was fabricated to convert ambient vibration energy to electrical power as a AlN piezoelectric cantilever with Si proof-mass. To be compatible with CMOS process, AlN thin film was grown at low temperature by RF magnetron sputtering and micro power generators were fabricated by MEMS technologies. X-ray diffraction pattern proved that the grown AlN film had highly(002) orientation with low value of FWHM(full width at the half maximum, θ = 0.276o) in the rocking curve around(002) reflections. The implemented harvester showed the 198.5 μm highest membrane displacement and generated 6.4 nW of electrical power to 80 kΩ resistive load with 22.6 mVrms voltage from 1.0 G acceleration at its resonant frequency of 389 Hz. From these results, the AlN piezoelectric MPG will be possible to suitable with the batch process and confirm the possibility for power supply in portable, mobile and wearable microsystems.
참고문헌 (10)
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