수정진동자를 이용한 메탈 삽입 테프론 다이어프램 압전소자모듈의제조 및 특성
Fabrication and characteristic of metal insertedteflon diaphragm piezoeletric device module using quartz crystal oscillator
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초록
Top of the alumina body which is made according to plan has been printed using a screen printer equipment in order to print an electrode pattern. The electrode is connected with the quartz crystal oscillator of the piezoelectricity method which has a piezoelectric characteristic. The pressure contact department has been experimented using three type of the teflon. The teflon is good for pressure delivery vector but it is bad restitution. So we devised the structure which inserts the metal in the teflon. Bottom of the module is connected with the signal processing department which is planned in advance and then has investigated to characteristic. Therefore we have got the best output-voltage and frequency characteristic follows in the pressure.
Abstract
Top of the alumina body which is made according to plan has been printed using a screen printer equipment in order to print an electrode pattern. The electrode is connected with the quartz crystal oscillator of the piezoelectricity method which has a piezoelectric characteristic. The pressure contact department has been experimented using three type of the teflon. The teflon is good for pressure delivery vector but it is bad restitution. So we devised the structure which inserts the metal in the teflon. Bottom of the module is connected with the signal processing department which is planned in advance and then has investigated to characteristic. Therefore we have got the best output-voltage and frequency characteristic follows in the pressure.
참고문헌 (8)
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- Rodriguez-Pardo, "Resolution in quartz crystal oscillator circuits for high sensitivity microbalance sensors in damping media", Sensors and Actuators B: Chemical, 103, pp.318~324 (2004)
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- 김상종, "Screen Printing법을 이용한 PMN-PZT후막 의 제조 및 특성연구", J. the Korean Institute of Electrical and Electronic Material Engineers, 13(11), pp.921~925 (2000)