진공여과증착법을 이용한 SWNT-PdOx계 수소센서
Hydrogen sensor of SWNTs-PdOx system using the vacuumfiltering deposition method
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Hydrogen gas sensors were fabricated using PdOx loaded with SWNTs. The nanoparticle powders of SWNTs-PdOx composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against hydrogen gas. The composition ratio that exhibited the highest response to hydrogen gases was SWNTs : PdOx = 98 : 2 in wt% ratio at operating temperature of about 150 oC. The response and recovery times were shorter than 1.0 min. in presence of 1000 ppm hydrogen.
Abstract
Hydrogen gas sensors were fabricated using PdOx loaded with SWNTs. The nanoparticle powders of SWNTs-PdOx composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against hydrogen gas. The composition ratio that exhibited the highest response to hydrogen gases was SWNTs : PdOx = 98 : 2 in wt% ratio at operating temperature of about 150 oC. The response and recovery times were shorter than 1.0 min. in presence of 1000 ppm hydrogen.
참고문헌 (21)
- A.Katsuki, "H2 Selective gas sensor based on SnO2", Sens. Actuators B, 78, pp.83~88 (2001)
- T. Sasahara, "Highly sensitive detection of volatile organic compounds by an adsorption", combustion-type sensor based on mesoporous silica, 2005, pp.108, 48~483
- Chi-Hwan Han, "Micro-bead of nano-crystalline F-doped SnO2 as a sensitive hydrogen gas sensor", Sens. Actuators B, 109, pp.264~269 (2005)
- 홍대웅, "Pd", TiO2,Pt, 한국센서학회 종합학술대회, pp.2006[DOI]
- 김찬우, "평판형 접촉연소식 마이크로 수소센서의 감지특성 향상", 센서학회지, 18(3), pp.202~206 (2009), 한국센서학회
- 홍대웅, "TiO2 광촉매와 UV LED를 이용한 접촉연소식 수소센서", 센서학회지, 16(1), pp.7~10 (2007), 한국센서학회
- 정귀상, "Pd", 다결정 3C-SiC 쇼트키 다이오드형 수소센서의 제작과 그 특성, 2009, pp.18(3), 222~225[DOI]
- 김광호, "수소 센서용 Pd 첨가한 WO3 박막의 특성", 센서학회지, 15(2), pp.120~126 (2006), 한국센서학회
- 강기호, "Pd-black 촉매금속 이용한 고성능 MISFET 형 수소센서", 센서학회지, 15(2), pp.90~96 (2006), 한국센서학회
- 조우성, "다이아프램 구조를 이용한 탄소나노튜브 가스 센서의 가스 감응 특성", 센서학회지, 15(1), pp.13~19 (2006), 한국센서학회
- 김민주, "단층 탄소나노튜브의 일산화질소 가스에 대한 감응특성과 열처리 효과", 센서학회지, 13(4), pp.292~297 (2004), 한국센서학회
- 조우성, "패턴이 형성된 탄소나노튜브 매트의 이산화질소 감응 특성", 센서학회지, 15(3), pp.199~204 (2006), 한국센서학회
- Junya Suehiro1, "Fabrication of a carbon nanotube-based gas sensor using dielectrophoresis and its application for ammonia detection by impedance spectroscopy", J. Phys. D: Appl. Phys, 36, pp.109~114 (2003)
- W-S Cho, "Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure", Electron Device Letters, 26, pp.498~500 (2005)
- S.Iijima, "Helical microtubules of graphitic carbon", Nature, 354, pp.56~58 (1991)
- Ray H. Baughman, "Carbon nanotubes-the route toward applications", Science, 297, pp.787~792 (2002)
- 김일진, "진공여과증착법을 이용한 SWNT-PtOx계 마이크로 톨루엔 가스센서", 센서학회지, 18(2), pp.179~183 (2009), 한국센서학회
- Y. Makita, "Synthesis of single wall carbon nanotubes by using arc discharge technique in nitrogen atmosphere", Eur. Phys. J. D, 34, pp.287~289 (2005)
- H-H Kim, "Synthesis of single wall carbon nanotubes by using arc discharge technique in nitrogen atmosphere", Japanese J. Applied Physics, 46, pp.1818~1820 (2007)
- A. Fujiwara, "Gas adsorption in the inside and outside of single-walled carbon nanotubes", Chemical Physics Letters, 336(3), pp.205~211 (2001)
- C. Cantalini, "Investigation on the O3 sensitivity properties of WO3 thin films prepared by sol-gel,thermal evaporation and r.f.sputtering techniques", Sensors and Actuators B, 64(1-3), pp.182~188 (2000)