진공여과증착법을 이용한 SWNT-PtOx계 마이크로 톨루엔 가스센서
Micro toluene gas sensor of SWNTs-PtOx system using the vacuum filtering deposition method
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초록
Toluene(C6H5CH3) gas sensors were fabricated using PtOx loaded with SWNTs by a new deposition method. The nanoparticle powders of SWNTs-PtOx composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against toluene gas which is a kind of the Volatile Organic Compounds. The composition ratio that exhibited the highest response to toluene gases was SWNTs : PtOx = 99 : 1 in wt% ratio at operating temperature of about 150 °C. The response and recovery times of the sensors were as short as less than 1 min., respectively.
Abstract
Toluene(C6H5CH3) gas sensors were fabricated using PtOx loaded with SWNTs by a new deposition method. The nanoparticle powders of SWNTs-PtOx composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against toluene gas which is a kind of the Volatile Organic Compounds. The composition ratio that exhibited the highest response to toluene gases was SWNTs : PtOx = 99 : 1 in wt% ratio at operating temperature of about 150 °C. The response and recovery times of the sensors were as short as less than 1 min., respectively.
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