높은 동적영역을 갖기 위한 정전용량형 센서의 최적화
Optimization of a capacitive sensor for high dynamic range
1
조회
0
다운로드
3
인용
0
참고문헌
키워드
초록
The capacitive sensor has a simple structure, compact size and low cost, but a small dynamic range. The small range is caused by use of gap variation. If the sensor takes area variation type with one plate moving horizontally, it can have a large measurable range. While the area variation has relatively low sensitivity, some studies have found methods to improve the sensitivity. Even though the methods are effective, parameters of the results are limited and 2 dimensional. This study provides more practical and 3 dimensional analysis and suggests relations between parameters. Using the results, the optimized design parameters of a high dynamic range capacitive sensor can be found.
Abstract
The capacitive sensor has a simple structure, compact size and low cost, but a small dynamic range. The small range is caused by use of gap variation. If the sensor takes area variation type with one plate moving horizontally, it can have a large measurable range. While the area variation has relatively low sensitivity, some studies have found methods to improve the sensitivity. Even though the methods are effective, parameters of the results are limited and 2 dimensional. This study provides more practical and 3 dimensional analysis and suggests relations between parameters. Using the results, the optimized design parameters of a high dynamic range capacitive sensor can be found.
참고문헌 (16)
- PI, "Capacitive position sensors - nanometrology solutions" (2009), Physikinstrunmente
- 김재열, "비접촉식 4-전극형 전기용량 센서를 이용한 in situ 정밀측정", 한국정밀공학회지, 19(3), pp.33~38 (2002), 한국정밀공학회
- Wolfendale PCF, "Capacitive displacement transducers with high accuracy and resolution", Physics E : Scientific Instruments, 1, pp.817~818 (1968)
- ITRS, "International technology roadmap for semiconductors" (2005)
- ITRS, "Advantages and challenges associated with the introduction of 450 mm wafers" (2005)
- Kim M, "A new linear encoder-like capacitive displacement sensor", Measurement, 39, pp.481~489 (2006)
- Zhu F, "A simple capacitive displacement sensor", Sensors and Actuators A, 25, pp.265~269 (1991)
- Hirasawa M, "Optimum from of capacitive transducer for displacement measurement", IEEE Transactions on Instrumentation and Measurement, IM-33, pp.276~280 (1984)
- A.A. Arkadan, "Design optimization of a capacitive transducer for displacement measurement", IEEE Transactions on magnetics, 35, pp.1869~1872 (1999)
- Heerens WC, "Application of capacitance techniques in sensor design", J. Physics E: Scientific Instruments, 19, pp.897~906 (1986)
- KLAASSEN KB, "Linear capacitive microdisplacement transduction using phase read-out", Sensors and Actuators, 3, pp.209~220 (1982)
- 김무진, "고정밀 및 긴 측정범위를 위한 전기용량형 변위 센서", 센서학회지, 14(4), pp.219~224 (2005), 한국센서학회
- Xiang Y, "The electrostatic capacitance of an inclined plate capacitor", J. Electrostatics, 64, pp.29~34 (2006)
- Homentcovschi D, "Electrostatic field of a system of aligned electrodes", J. Electrostatics, 26, pp.187~200 (1991)
- Kim M, "A new apacitive displacement sensor with high accuracy and long-range", Sensors and Actuators A, 103, pp.135~141 (2006)