분산 반사경 기반 패브리-페로 필터를 이용한 비분산적외선 CO2 센서의 감지 특성
Sensing characteristics of a non-dispersive infrared CO2 sensor using a Fabry-Perot filter based on distributed Bragg reflector
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Non-dispersive infrared (NDIR) gas sensors typically use an optical filter that transmits a discriminating 4.26 µm wavelength band to measure carbon dioxide (CO2), as CO2 absorbs 4.26 µm infrared. The filter performance depends on the transmittance and full width at half maximum (FWHM). This paper presents the fabrication, sensitivity, and selectivity characteristics of a distributed Bragg reflector (DBR)-based Fabry-Perot filter with a simple structure for CO2 detection. Each Ge and SiO2 films were prepared using the RF magnetron sputtering technique. The transmittance characteristics were measured using Fourier-transform infrared spectroscopy (FT-IR). The fabricated filter had a peak transmittance of 59.1% at 4.26 µm and a FWHM of 158 nm. In addition, sensitivity and selectivity experiments were conducted by mounting the sapphire substrate and the fabricated filter on an NDIR CO2 sensor measurement system. When measuring the sensitivity, the concentration of CO2 was observed in the range of 0–10000 ppm, and the selectivity was measured for environmental gases of 1000 ppm. The fabricated filter showed lower sensitivity to CO2 but showed higher selectivity with other gases.
Abstract
Non-dispersive infrared (NDIR) gas sensors typically use an optical filter that transmits a discriminating 4.26 µm wavelength band to measure carbon dioxide (CO2), as CO2 absorbs 4.26 µm infrared. The filter performance depends on the transmittance and full width at half maximum (FWHM). This paper presents the fabrication, sensitivity, and selectivity characteristics of a distributed Bragg reflector (DBR)-based Fabry-Perot filter with a simple structure for CO2 detection. Each Ge and SiO2 films were prepared using the RF magnetron sputtering technique. The transmittance characteristics were measured using Fourier-transform infrared spectroscopy (FT-IR). The fabricated filter had a peak transmittance of 59.1% at 4.26 µm and a FWHM of 158 nm. In addition, sensitivity and selectivity experiments were conducted by mounting the sapphire substrate and the fabricated filter on an NDIR CO2 sensor measurement system. When measuring the sensitivity, the concentration of CO2 was observed in the range of 0–10000 ppm, and the selectivity was measured for environmental gases of 1000 ppm. The fabricated filter showed lower sensitivity to CO2 but showed higher selectivity with other gases.
참고문헌 (18)
- F. Vega, "Current status of CO2chemical absorption research applied to CCS : Towards full deployment at industrial scale", Appl. Energy, 260, pp.114~313 (2020)
- A. F. Pérez-Cadenas, "Metal-doped carbon xerogels for the electro-catalytic conversion of CO 2 to hydrocarbons", Carbon N. Y, 56, pp.324~331 (2013)
- B. Liao, "Study on CuO±BaTiO 3 semiconductor CO 2 sensor", Sens. Actuators, 80, pp.208~214 (2001)
- M. Febrina, "Development of a simple CO2 sensor based on the thermal conductivity detection by a thermopile", Meas. J. Int. Meas. Confed, 133, pp.139~144 (2019)
- T. V. Dinh, "A review on non-dispersive infrared gas sensors : Improvement of sensor detection limit and interference correction", Sens. Actuators, B Chem., 231, pp.529~538 (2016)
- L. Fleming, "Reducing N2O induced cross-talk in a NDIR CO2 gas sensor for breath analysis using multilayer thin film optical interference coatings", Surf. Coat. Technol., 336, pp.9~16 (2018)
- R. Frodl, "A High-Precision NDIR CO2 gas sensor for automotive applications", IEEE Sens. J, 6(6), pp.1697~1705 (2006)
- R. Bogue, "Detecting gases with light : A review of optical gas sensor technologies", Sens. Rev., 35, pp.133~140 (2015)
- L. Kocsis, "The modified Beer-Lambert law revisited", Phys. Med. Biol, 51, pp.N91(1)~N91(51) (2006)
- 이장현, "독성가스 감지용 센서 기술 동향 리뷰", 센서학회지, 24(5), pp.311~318 (2015), 한국센서학회[DOI]
- J. Krüger, "Single-and multi-pulse femtosecond laser ablation of optical filter materials", Appl. Surf. Sci., 208, pp.233~237 (2003)
- R. L. Gentilman, "Strength and transmittance of sapphire and strengthened sapphire", J. Am. Ceram. Soc, 64, pp.C-116~C-127 (1981)
- N. J. Trappeniers, "The pressure coefficient of the infra-red refractive index of germanium", Phys., 45(4), pp.619~625 (1970)
- S. J. Jung, "Low-refractive-index and high-transmittance silicon oxide with a mixed phase of n-type microcrystalline silicon as intermediate reflector layers for tandem solar cells", Sol. Energy. Mater. Sol. Cells, 121, pp.1~7 (2014)
- Y. Zou, "Midinfrared holey and slotted photonic crystal waveguides in silicon-on-sapphire for chemical warfare simulant detection", Sens. Actuators B : Chemical, 221, pp.1094~1103 (2015)
- 도남곤, "이산화탄소 감지를 위한 4.26 µm 필터용 poly Si", SiO2 다층 박막 기반의 패브리 페로-필터, 2021, pp.30(1), 56~60[DOI]
- 도남곤, "비분산적외선 CO2 센서를 위한 DBR기반의 패브리 페로-필터 설계 및 성능 연구", 센서학회지, 30(4), pp.250~254 (2021), 한국센서학회
- M. Cho, "Amorphous Si", SiO 2 distributed Bragg reflectors with transfer printed single-crystalline Si nanomembranes, 2016, pp.34(4), 040601(1)~040601(34)