이산화탄소 검출을 위한 고감도 비분산 적외선 가스센서의 광도파관 구조 설계
Optical waveguide structure design of Non-dispersive Infrared (NDIR) CO2 gas sensor for high-sensitivity
2
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
The Non-dispersive Infrared (NDIR) gas sensor has high selectivity, measurement reliability, and long lifespan. Thus, even though the NDIR gas sensor is expensive, it is still widely used for carbon dioxide (CO2) detection. In this study, to reduce the cost of the NDIR CO2 gas sensor, we proposed the new optical waveguide structure design based on ready-made gas pipes that can improve the sensitivity by increasing the initial light intensity. The new optical waveguide design is a structure in which a part of the optical waveguide filter is inclined to increase the transmittance of the filter, and a parabolic mirror is installed at the rear end of the filter to focus the infrared rays passing through the filter to the detector. In order to examine the output characteristics of the new optical waveguide structure design, optical simulation was performed for two types of IR-source. As a result, the new optical waveguide structure can improve the sensitivity of the NDIR CO2 gas sensor by making the infrared rays perpendicular to the filter, increasing the filter transmittance.
Abstract
The Non-dispersive Infrared (NDIR) gas sensor has high selectivity, measurement reliability, and long lifespan. Thus, even though the NDIR gas sensor is expensive, it is still widely used for carbon dioxide (CO2) detection. In this study, to reduce the cost of the NDIR CO2 gas sensor, we proposed the new optical waveguide structure design based on ready-made gas pipes that can improve the sensitivity by increasing the initial light intensity. The new optical waveguide design is a structure in which a part of the optical waveguide filter is inclined to increase the transmittance of the filter, and a parabolic mirror is installed at the rear end of the filter to focus the infrared rays passing through the filter to the detector. In order to examine the output characteristics of the new optical waveguide structure design, optical simulation was performed for two types of IR-source. As a result, the new optical waveguide structure can improve the sensitivity of the NDIR CO2 gas sensor by making the infrared rays perpendicular to the filter, increasing the filter transmittance.
참고문헌 (17)
- A. Ortiz Perez, "A wireless gas sensor network to monitor indoor environmental quality in schools", Sensors., 18(12), pp.1~13 (2018)
- W. Luo, "Infrared detector based on crystal ion sliced LiNbO3 single-crystal film with bcb bonding and thermal insulating layer", Microelectron Eng., 213, pp.1~5 (2019)
- G. Visco, "Organic carbons and TOC in waters: an overview of the international norm for its measurement", Microchem. J, 79(1-2), pp.185~191 (2005)
- B. Dweik, "Rapid determination of Total Organic Carbon(TOC)in water system", Proc. of the 49th Int. Conf. on Environ Systems, pp.1~10 (2019)
- S. Esfahani, "Development of a tuneable NDIR optical electronic nose", Sensors, 20(23), pp.6875(1)~6875(16) (2020)
- H. Liu, "Design of a six-gas NDIR gas sensor using an integrated optical gas chamber", Opt. Express, 28(8), pp.11451~11462 (2020)
- 이승환, "Infrared Light Absorbance: a New Method for Temperature Compensation in Nondispersive Infrared CO2 Gas Sensor", 센서학회지, 29(5), pp.303~311 (2020), 한국센서학회
- Y. Jing, "Design and optimization of an integrated MEMS gas chamber with high transmissivity", Digit. Commun. Netw, 7(1), pp.82~91 (2021)
- J. Hodgkinson, "Non-dispersive infra-red(NDIR)measurement of carbon dioxide at 4. 2um in a compact and optically efficient sensor", Sens. Actuators B Chem., 186, pp.580~588 (2013)
- 정유진, "An Optical Cavity Design for an Infrared Gas Detector Using an Off-axis Parabolic Mirror", Current Optics and Photonics, 3(5), pp.374~381 (2019), 한국광학회[DOI]
- J. Hodgkinson, "Optical gas sensing: a review", Meas. Sci. Technol, 24(1), pp.012004(1)~012004(59) (2012)
- R. V. Maikala, "Modified Beer’s Law-historical perspectives and relevance in near-infrared monitoring of optical properties of human tissue", Int. J. Ind. Ergon., 40(2), pp.125~134 (2010)
- J. Maryrwöger, "Modeling of Infrared Gas sensors using a ray tracing approach", IEEE Sens. J., 10(11), pp.1691~1698 (2010)
- 도남곤, "비분산적외선 CO2 센서를 위한 DBR기반의 패브리 페로-필터 설계 및 성능 연구", 센서학회지, 30(4), pp.250~254 (2021), 한국센서학회
- M. S. Rauscher, "Dual-channel mid-infrared sensor based on tunable Fabry-Perot filters for fluid monitoring applications", Sens. Actuators B-Chem., 259, pp.420~427 (2018)