수위, 온도, 전도도 측정을 위한 다기능 One-Chip 센서의 제조
Fabrication of a multi-functional one-chip sensor for detecting water depth, temperature, and conductivity
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Abstract
The multi-functional one-chip sensor has been fabricated to reduce output variation under various water environment. There were a temperature sensor, a piezoresistive type pressure sensor, and a electrode type conductivity sensor in the fabricated one-chip sensor. This sensor was measured water depth in the range of 0~180cm, temperature in the range of 0~50oC, and salinity in the range of 0wt%~5wt%, respectively. Since the change of water depth in solution environment depends on various factors such as salinity, latitude, temperature, and atmospheric pressure, the water depth sensor is needed to be compensated. We tried to compensate the salinity and temperature dependence for the pressure in water by using lookup-table method.
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