힌지구조를 갖는 초소형 콘덴서 마이크로폰
A novel miniature condenser microphone with a hinge diaphragm
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This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finite-element analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hingediaphragm. And we fabricated the miniature condenser microphones with area of 1.5 m×1.5 m. From the simulationtimes, compared with flat diaphragms. The sensitivities of fabricated miniature microphones are about 12.87V/Pa at1 kHz under a low bias voltage of 1 V, and the frequency response is flat upto 13 kHz.
Abstract
This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finite-element analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hingediaphragm. And we fabricated the miniature condenser microphones with area of 1.5 m×1.5 m. From the simulationtimes, compared with flat diaphragms. The sensitivities of fabricated miniature microphones are about 12.87V/Pa at1 kHz under a low bias voltage of 1 V, and the frequency response is flat upto 13 kHz.
참고문헌 (6)
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