다양한 동작신호의 사용에 따른 연동형 마이크로 펌프의 성능 향상
Performance Improvement of Peristaltic Micropump Using Various Actuating Signal
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초록
This paper described the development of electrostatically driven peristaltic micropump. The proposed micropump consists of a flexible membrane and a single chamber which electrodes are inserted. The single chamber is divided into smaller cells by the electrodes. The fabricated micropump was operated with four electrodes in the membrane and a various phase sequencing actuation. We studied the changes in the flow rate corresponding to the actuating signal applied to the micropump under the zero hydraulic pressure difference between lnlet port and outlet port. The pump was operated from 60 to 130 V. Whereas the maximum flow rate in basic actuating signal is about 83 1/min at 15 Hz, the maximum flow rate in optimized actuating signal is about 114 l/min at 10 Hz.
Abstract
This paper described the development of electrostatically driven peristaltic micropump. The proposed micropump consists of a flexible membrane and a single chamber which electrodes are inserted. The single chamber is divided into smaller cells by the electrodes. The fabricated micropump was operated with four electrodes in the membrane and a various phase sequencing actuation. We studied the changes in the flow rate corresponding to the actuating signal applied to the micropump under the zero hydraulic pressure difference between lnlet port and outlet port. The pump was operated from 60 to 130 V. Whereas the maximum flow rate in basic actuating signal is about 83 1/min at 15 Hz, the maximum flow rate in optimized actuating signal is about 114 l/min at 10 Hz.
참고문헌 (12)
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