Highly Sensitive Platinum-Decorated Tungsten Oxide for Ultra-Low-Concentration Hydrogen Detection
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The global transition towards a hydrogen-based economy has increased the need for highly sensitive hydrogen gas sensors capableof detecting ultra-low concentrations. Although conventional hydrogen sensors have been widely studied and applied, they face fundamentallimitations in terms of sensitivity, selectivity, and power consumption at low concentrations. Here, we report a high-performancehydrogen sensor based on platinum-decorated tungsten oxide (WO3/Pt) fabricated using MEMS technology. The sensor wassystematically constructed through the sequential processes of thermal oxidation, LPCVD, electrode patterning, and membrane formation. The WO3/Pt composite, synthesized via a modified wet impregnation method and thoroughly characterized via XRD, demonstrateda uniform platinum distribution on the WO3 surface. The fabricated sensor exhibited exceptional sensitivity across a hydrogenconcentration range of 100–500 ppm with enhanced concentration resolution and reproducibility. Under optimal operating conditionsat 300°C, the sensor achieved rapid response/recovery kinetics while maintaining a low power consumption of 42.1 mW. The enhancedsensing performance is attributed to the synergistic effects between WO3 and the Pt catalyst, specifically the spillover effect and efficientmodulation of the depletion layer at the Pt-WO3 interface.
Abstract
The global transition towards a hydrogen-based economy has increased the need for highly sensitive hydrogen gas sensors capableof detecting ultra-low concentrations. Although conventional hydrogen sensors have been widely studied and applied, they face fundamentallimitations in terms of sensitivity, selectivity, and power consumption at low concentrations. Here, we report a high-performancehydrogen sensor based on platinum-decorated tungsten oxide (WO3/Pt) fabricated using MEMS technology. The sensor wassystematically constructed through the sequential processes of thermal oxidation, LPCVD, electrode patterning, and membrane formation. The WO3/Pt composite, synthesized via a modified wet impregnation method and thoroughly characterized via XRD, demonstrateda uniform platinum distribution on the WO3 surface. The fabricated sensor exhibited exceptional sensitivity across a hydrogenconcentration range of 100–500 ppm with enhanced concentration resolution and reproducibility. Under optimal operating conditionsat 300°C, the sensor achieved rapid response/recovery kinetics while maintaining a low power consumption of 42.1 mW. The enhancedsensing performance is attributed to the synergistic effects between WO3 and the Pt catalyst, specifically the spillover effect and efficientmodulation of the depletion layer at the Pt-WO3 interface.
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