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다양한 재질에서의 flat-top 빔을 이용한 LIPSS 형성에 관한 연구

A study of fabrication of LIPSS using flat-top beam with various materials

최원석|신영관|조성학|최두선|최준하
한국금형공학회 (Korea Society of Die & Mould Engineering)|2021.09|Design & Manufacturing|제15권 제3호|pp. 26-31|DOI 10.22847/ksdme.15.3.202109.005

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키워드

Femtosecond laserFlat-top beamLIPSS

초록

In this study, laser-induced periodic surface structure (LIPSS) was fabricated on Ni, Si, and GaAs samples using a flat-top beam with a uniform energy distribution that was fabricated using a Gaussian femtosecond laser with a mechanical slit and tube lens. Unlike the Gaussian beam, the flat-top beam has a uniform beam profile, therefore the center and the periphery of the fabricated LIPSS have similar line periodicity. In addition, LIPSS was obtained not only in metals but also in metalloids and metals and metalloid compounds by using the narrow pulse width characteristic of a femtosecond laser.

Abstract

In this study, laser-induced periodic surface structure (LIPSS) was fabricated on Ni, Si, and GaAs samples using a flat-top beam with a uniform energy distribution that was fabricated using a Gaussian femtosecond laser with a mechanical slit and tube lens. Unlike the Gaussian beam, the flat-top beam has a uniform beam profile, therefore the center and the periphery of the fabricated LIPSS have similar line periodicity. In addition, LIPSS was obtained not only in metals but also in metalloids and metals and metalloid compounds by using the narrow pulse width characteristic of a femtosecond laser.

참고문헌 (32)

  1. J. Bonse, "Femtosecond laser-induced periodic surface structures", J. Laser Appl, 24, pp.042006~ (2012)
  2. J. Bonse, "Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air", Appl. Phys. A Mater. Sci. Process, 71, pp.657~665 (2000)
  3. J. Bonse, "Femtosecond laser ablation of silicon-modification thresholds and morphology", Appl. Phys. A Mater. Sci. Process., 74, pp.19~25 (2002)
  4. J. Wang, "Ultrafast dynamics of femtosecond laser-induced periodic surface pattern formation on metals", Appl. Phys. Lett., 87, pp.1~3 (2005)
  5. J. Bonse, "Applications of laser-induced periodic surface structures(LIPSS)", Laser-Based Micro- Nanoprocessing XI. 10092, 100920N, ~ (2017)
  6. R. P. Seisyan, "Nanolithography in microelectronics:A review", Tech. Phys., 56, pp.1061~1073 (2011)
  7. K. L. Lee, "Optimization of periodic gold nanostructures for intensity-sensitive detection", Appl. Phys. Lett., 99 (2011)
  8. L. Parellada-Monreal, "Laser-induced periodic surface structures on ZnO thin film for high response NO 2 detection", Appl. Surf. Sci., 476, pp.569~575 (2019)
  9. A. Karabchevsky, "Metal grating on a substrate nanostructure for sensor applications", Photonics Nanostructures - Fundam. Appl., 7, pp.170~175 (2009)
  10. Z. Dai, "Honeycomb-like periodic porous LaFeO3 thin film chemiresistors with enhanced gas-sensing performances", ACS Appl. Mater. Interfaces, 6, pp.16217~16226 (2014)
  11. C. Valsecchi, "Periodic metallic nanostructures as plasmonic chemical sensors", Langmuir, 29, pp.5638~5649 (2013)
  12. A. Pimpin, "Reviews on microand nanolithography techniques and their applications", Eng. J., 16, pp.37~55 (2012)
  13. Serap Aksu, "High-Throughput Nanofabrication of Infrared Plasmonic Nanoantenna Arrays for Vibrational Nanospectroscopy", Nano Letters, 10(7), pp.2511~2518 (2010), American Chemical Society (ACS)[DOI]
  14. Jorn Bonse, "Laser-Induced Periodic Surface Structures— A Scientific Evergreen", IEEE Journal of Selected Topics in Quantum Electronics, 23(3) (2017), Institute of Electrical and Electronics Engineers (IEEE)[DOI]
  15. J. E. Sipe, "Laser-induced periodic surface structure. I. Theory", Phys. Rev. B., 27, pp.1141~1154 (1983)
  16. M. Huang, "Origin of laser-induced near-subwavelength ripples : Interference between surface plasmons and incident laser", ACS Nano, 3, pp.4062~4070 (2009)
  17. J. Bonse, "On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses", J. Appl. Phys, 106 (2009)
  18. R. Buividas, "Mechanism of fine ripple formation on surfaces of(semi)transparent materials via a half-wavelength cavity feedback", Nanotechnology, 22 (2011)
  19. J. J. J. Nivas, "Direct Femtosecond Laser Surface Structuring with Optical Vortex Beams Generated by a q-plate", Sci. Rep., 5, pp.1~12 (2015)
  20. Mirza I, "Ultrashort pulse laser ablation of dielectrics: Thresholds, mechanisms, role of breakdown", Sci Rep,, pp.1~11 (2016)
  21. Nedialkov NN, "Ablation of metals by ultrashort laser pulses", J Phys D Appl. Phys, 37, pp.638~643 (2004)
  22. Ashkenasi D, "Fundamentals and advantages of ultrafast micro-structuring of transparent materials", Appl. Phys A Mater Sci Process, 77, pp.223~228 (2003)
  23. Chichkov, B. N., "A Femtosecond, picosecond and nanosecond laser ablation of solids", Applied phys A, pp.109~115 (1996)
  24. Perry MD, "Ultrashort-pulse laser machining of dielectric materials", J Appl. Phys, 85, pp.6803~6810 (1999)
  25. Ams M, "Femtosecond-laser-induced refractive index modifications for photonic device processing" (2012), Woodhead Publishing Limited
  26. Sugioka K, "Femtosecond laser three-dimensional micro-and nanofabrication", Appl Phys Rev, 1 (2014)
  27. H. W. Chang, "Nanostructured Ag surface fabricated by femtosecond laser for surface-enhanced Raman scattering", J. Colloid Interface Sci., 360, pp.305~308 (2011)
  28. C. Byram, "Surface-enhanced Raman scattering studies of gold-coated ripple-like nanostructures on iron substrate achieved by femtosecond laser irradiation in water", J. Raman Spectrosc, 50, pp.1103~1113 (2019)
  29. A. Wang, "Low-adhesive superhydrophobic surface-enhanced Raman spectroscopy substrate fabricated by femtosecond laser ablation for ultratrace molecular detection", J. Mater. Chem. B., 5, pp.777~784 (2017)
  30. I. Gnilitskyi, "High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures : Physical origin of regularity", Sci. Rep., 7, pp.1~11 (2017)
  31. M. D. Perry, "Ultrashort-pulse laser machining of dielectric materials", J. Appl. Phys., 85, pp.6803~6810 (1999)
  32. M. Ams, "Femtosecond-laser-induced refractive index modifications for photonic device processing" (2012), Woodhead Publishing Limited

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